MORI Masahito | Central Research Laboratory, Hitachi, Ltd.
スポンサーリンク
概要
関連著者
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ITABASHI Naoshi
Central Research Laboratory, Hitachi, Ltd.
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MORI Masahito
Central Research Laboratory, Hitachi, Ltd.
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Takahashi Kazuo
Department of Electronic Science and Engineering, Kyoto University
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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OSANO Yugo
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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FUJII Takashi
Kasado Semiconductor Equipment Product Division, Hitachi, Ltd.
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Saito Go
Kasado Semiconductor Equipment Product Division Hitachi Ltd.
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ISHIMURA Hiroaki
Kasado Semiconductor Equipment Product Division, Hitachi, Ltd.
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AKIYAMA Hiroshi
Kasado Semiconductor Equipment Product Division, Hitachi, Ltd.
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YOSHIGAI Motohiko
Hitachi Techno Eng. Co., Ltd.
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KOJIMA Masayuki
Semiconductor & Integrated Circuit Division, Hitachi, Ltd.
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OKAMOTO Keiji
Hitachi ULSI Systems Co. Ltd.
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TSUJIMOTO Kazunori
Central Research Laboratory, Hitachi, Ltd.
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Itabashi Naoshi
Central Research Laboratory Hitachi Ltd.
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Mori Masahito
Central Research Laboratory Hitachi Ltd.
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Ishimura Hiroaki
Kasado Semiconductor Equipment Product Division Hitachi Ltd.
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Yoshigai Motohiko
Hitachi Techno Eng. Co. Ltd.
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Tsujimoto Kazunori
Central Research Laboratory Hitachi Ltd
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Tsujimoto Kazunori
Central Research Laboratory Hitachi Ltd.
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Kojima Masayuki
Semiconductor & Integrated Circuit Division Hitachi Ltd.
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Akiyama Hiroshi
Kasado Semiconductor Equipment Product Division Hitachi Ltd.
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Fujii Takashi
Kasado Semiconductor Equipment Product Division Hitachi Ltd.
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TACHI Shin'ichi
Central Research Laboratory, Hitachi, Ltd.
著作論文
- Precise CD-Controlled Gate Etching Using UHF-ECR Plasma
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl_2/O_2 Plasmas