Generation of Long and High-Density Plasma Column Using Metal-Antenna Surface Wave-Excited Plasma Source
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概要
- 論文の詳細を見る
We investigated the effect of gas pressure on the length of a microwave-excited high-density plasma column sustained along a graphite rod (25 cm in length and 1.0 cm in diameter), which was negatively biased against a grounded chamber. It was confirmed that the length of the overdense (${>}10^{11}$ cm-3) plasma column increased with increasing gas pressure and negative voltage. At a gas pressure of 33 Pa, we obtained the longest plasma column covering the entire surface of the rod with a negative voltage of $-150$ V and an input microwave power of 100 W.
- Japan Society of Applied Physicsの論文
- 2005-09-10
著者
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Umehara Noritsugu
Department Of Mechanical Science And Engineering Graduate School Of Engineering Nagoya University
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Kousaka Hiroyuki
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Umehara Noritsugu
Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-0814, Japan
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Kousaka Hiroyuki
Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-0814, Japan
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