Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
スポンサーリンク
概要
著者
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Umehara Noritsugu
Department Of Mechanical Science And Engineering Graduate School Of Engineering Nagoya University
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Kousaka Hiroyuki
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Matsui Ryosuke
Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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- Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma
- Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
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