Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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MARUMOTO Kenji
Central Research Laboratory, Mitsubishi Electric Corporation
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YABE Hideki
Central Research Laboratory, Mitsubishi Electric Corporation
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MATSUI Yasuji
Central Research Laboratory, Mitsubishi Electric Corp.
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Yamashita Hiroaki
Central Research Institute Mitsubishi Materials Corporation
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Yabe Hideki
Central Research Laboratory Mitsubishi Electric Corp.
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Muto Y
The Institute For Materials Research Tohoku University
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KIKUCHI Noribumi
Central Research Institute, Mitsubishi Materials Corporation
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Matsui Yasuji
O Ntt Lsi Laboratories
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Matsui Yasuji
Central Research Laboratory Mitsubishi Electric Corp.
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Kikuchi Noribumi
Central Research Institute Mitsubishi Materials Corporation
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