50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-12-15
著者
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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ITOGA Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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MARUMOTO Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Itoga Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
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