SUMITANI Hiroaki | Advanced Technology R&D Center, Mitsubishi Electric Corp.
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概要
関連著者
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
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SUITA Muneyoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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ITOGA Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Itoga Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Suita Muneyoshi
Advanced Technology R&d Center Mitsubishi Electric Corp.
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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斧 高一
京都大学大学院工学研究科
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Inoue M
Setsunan Univ. Osaka Jpn
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TANIMURA Junji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Ono K
Department Of Applied Chemistry The University Of Tokyo
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Ono K
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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Ono K
Univ. California Ca Usa
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Inoue M
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Tanimura Junji
Advanced Technology R&d Center Mitsubishi Electric Corp
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Inoue M
Kyoto Univ. Kyoto Jpn
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KAWAHARA Toshio
Department of Materials Science and Engineering, National Defense Academy
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Inoue Masataka
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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HIFUMI Takashi
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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INOUE Masami
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Ono K
The Faculty Of Engineering Ehime University
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Yamamuka M
Mitsubishi Electric Corp. Hyogo Jpn
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Hifumi T
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Kawahara T
Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn
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KAWAHARA Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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TARUTANI Masayoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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HORIKAWA Tsuyoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Tanimura Junji
The Authors Are With The Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Suita M
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Horikawa Tsuyoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Tarutani Masayoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawahara T
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawahara Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Hifumi Takashi
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Matsumoto T
Institute Of Scientific And Industrial Reserch Univ Of Osaka
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Inoue M
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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YAMAMUKA Mikio
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Sentoku Koichi
Nanotechnology & Advanced System Research Laboratories Canon Inc.
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OHSAWA Hiroshi
Nanotechnology Research Center, Canon Inc.
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SAITOH Kenji
Nanotechnology Research Center, Canon Inc.
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KUMADA Teruhiko
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MATSUI Yasuji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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INA Hideki
Nanotechnology & Advanced System Research Laboratories, Canon Inc.
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MATSUMOTO Takahiro
Nanotechnology & Advanced System Research Laboratories, Canon Inc.
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Muto Y
The Institute For Materials Research Tohoku University
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Yamamuka Mikio
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Ohsawa H
Toshiba Corp. Kawasaki Jpn
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AMEMIYA Mitsuaki
Nanotechnology & Advanced System Research Laboratories, Canon Incorporated
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MARUMOTO Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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OGUSHI Nobuaki
Nanotechnology Research Center, Canon Inc.
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MIZUSAWA Nobutoshi
Nanotechnology Research Center, Canon Inc.
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UDA Koji
Nanotechnology Research Center, Canon Inc.
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Uda Koji
Nanotechnology Research Center Canon Inc.
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Ogushi Nobuaki
Nanotechnology Research Center Canon Inc.
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Marumoto Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kumada Teruhiko
Advanced Tech. R/d Center Mitsubishi Electric Corp.
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YAMAMURA Mikio
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Ina Hideki
Nanotechnology Research Center Canon Inc.
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Matsui Yasuji
O Ntt Lsi Laboratories
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Amemiya Mitsuaki
Nanotechnology & Advanced System Research Laboratories Canon Incorporated
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Saitoh Kenji
Nanotechnology Research Center Canon Inc.
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Mizusawa Nobutoshi
Nanotechnology Research Center Canon Inc.
著作論文
- Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography
- Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
- Alignment Mark Optimization to Reduce Tool- and Wafer-Induced Shift for XRA-1000
- Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask
- 50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
- Critical Dimension Control in Synchrotron Radiation Lithography Using a Negative-Tone Chemical Amplification Resist
- Mechanisms of X-Ray Radiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors
- Mechanisms of Synchrotron X-Ray Irradiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors