Matsui Yasuji | O Ntt Lsi Laboratories
スポンサーリンク
概要
関連著者
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Matsui Yasuji
O Ntt Lsi Laboratories
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Aya S
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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MATSUI Yasuji
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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YABE Hideki
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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AYA Sunao
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Central Research Laboratory, Mitsubishi Electric Corporation
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MATSUI Yasuji
Central Research Laboratory, Mitsubishi Electric Corp.
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Muto Y
The Institute For Materials Research Tohoku University
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Matsui Yasuji
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Matsui Yasuji
Central Research Laboratory Mitsubishi Electric Corp.
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Hokama A
Control And Prevention Of Infectious Diseases Department Of Medicine And Therapeutics Faculty Of Med
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Hokama Akira
琉球大学 医学部感染病態制御学
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Aoyama H
Aset Super-fine Sr Lithography Laboratory
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Aoyama Hajime
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Aoyama Hajime
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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Kikuchi Y
Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn
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Kikuchi Yukiko
Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories
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Kikuchi Yukiko
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Hokama Akira
The First Department Of Internal Medicine Faculty Of Medicine University Of The Ryukyus
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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YABE Hideki
Central Research Laboratory, Mitsubishi Electric Corporation
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Fujino Takeshi
Wood Research Institute, Kyoto University
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Fujino T
Information Technology R&d Center Mitsubishi Electric Corporation:communication Systems R&d
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Fujino T
Wood Research Institute Kyoto University
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Fujino Takeshi
Department Of Electric And Electronic Engineering Ritsumeikan University
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MATSUI Yasuji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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MATSUI Yasuji
o NTT Telecommunications Energy Laboratories
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Yabe Hideki
Central Research Laboratory Mitsubishi Electric Corp.
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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AYA Sunao
Central Research Laboratory, Mitsubishi Electric Corporation
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Watakabe Y
Mitsubishi Electric Corp. Itami
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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AOYAMA Hidetake
Department of Electrical Engineering, Faculty of Engineering, Gunma University
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MORITA Hirofumi
NTT LSI Laboratories
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HAGA Tetsuya
Department of Applied Physics, Hokkaido University
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中山 喜萬
阪大工
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OHKI Shigehisa
NTT Advanced Technology Corp.
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MOROSAWA Tetsuo
NTT LSI Laboratories
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Ohki S
Ntt Telecommunications Energy Laboratories
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Morosawa Tetsuo
Ntt Telecommunications Energy Laboratories
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TAGUCHI Takao
SORTEC Corporation
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EZAKI Mizunori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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NAKAYAMA Yoshinori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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KIKUCHI Yukiko
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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TSUBOI Shinji
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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WATANABE Hiroshi
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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AOYAMA Hajime
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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MATSUI Yasuji
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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OHKI Shigehisa
NTT Telecommunications Energy Laboratories
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SAITO Kenichi
NTT Telecommunications Energy Laboratories
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MATSUDA Tadahito
NTT Telecommunications Energy Laboratories
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WATANABE Hiroshi
Super-fine SR Lithography Laboratory, Association of Super-Advanced Electronics Technologies(ASET),
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MATSUDA Tadahito
NTT System Electronics Laboratories
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Inoue M
Setsunan Univ. Osaka Jpn
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Haga T
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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FUJINO Takeshi
ULSI Laboratory, Mitsubishi Electric Corporation
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Morita H
Lcd Division Toshiba Corporation
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SAITO Keisuke
Application Laboratory
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Suzuki M
Shizuoka Univ. Hamamatsu
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Okada Ikuo
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) C
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Suzuki M
Department Of Electronic Engineering Faculty Of Engineering Hokkaido University
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Saito Keisuke
Application Laboratory Analytical Division Philips Japan Ltd.
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Saito K
Institute Of Industrial Science University Of Tokyo
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Ezaki M
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Inoue M
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Inoue M
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Kyoto Univ. Kyoto Jpn
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Taguchi T
Research Laboratories Nippondenso Co. Ltd.
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Sasaki K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Minami Hiroyuki
Optoelectronic And Microwave Devices Laboratory Mitsubishi Electric Corporation
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Suzuki Mitsuru
Cryogenic Centre University Of Tokyo
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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Inoue Masataka
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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FUJINO Takeshi
LSI R&D Laboratory, Mitsubisi Electric Corporation
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WATAKABE Yaichiro
LSI R&D Laboratory, Mitsubisi Electric Corporation
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Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Matsui Y
Nims Tsukuba Jpn
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Saito Kenichi
Institute Of Industrial Science University Of Tokyo
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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TAGUCHI Takao
ASET Super-fine SR Lithography Laboratory
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DEGUCHI Kimiyoshi
NTT Telecommunications Energy Laboratories
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FUKUDA Makoto
NTT Telecommunications Energy Laboratories
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MORITA Hirofumi
NTT Telecommunications Energy Laboratories
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Suzuki M
Sci. Univ. Tokyo Chiba Jpn
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Suzuki M
Research Center Asahi Glass Co. Ltd.
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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AYA Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MATSUBA Motoko
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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SASAKI Kei
Manufacturing Development Laboratory, Mitsubishi Electric Corporation
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WATAKABE Yaichiro
ULSI R & D Laboratory, Mitsubishi Electric Corporation
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Suzuki Masanori
Ntt Telecommunications Energy Laboratories
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Nakayama Yoshinori
Aset Super-fine Sr Lithography Laboratory
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MATSUI Yoshio
Environmental Pollution Research Institute of Nagoya City
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Suzuki Mariko
Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation
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Minami Hiroyuki
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corp.
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Fujino Takeshi
Ulsi Laboratory Mitsubishi Electric Corporation
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Fukuda M
Chitose Inst. Sci. And Technol. Hokkaido Jpn
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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INOUE Masami
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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KUMADA Teruhiko
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MARUMOTO Kenji
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies
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HAGA Tsuneyuki
NTT Telecommunications Energy Laboratories
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Yamashita Hiroaki
Central Research Institute Mitsubishi Materials Corporation
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TAKEUCHI Nobuyuki
NTT Telecommunications Energy Laboratories
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TAGUCHI Takao
NTT Telecommunications Energy Laboratories
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AOYAMA Hajime
o NTT Telecommunications Energy Laboratories
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MITSUI Souichiro
NTT Telecommunications Energy Laboratories
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YOSHIOKA Nobuyuki
LSI R&D Lab, Mitsunishi Electric Corporation
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Aya Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Saito Kunio
Ntt Microsystem Integration Laboratories
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Taguchi T
Department Of Electrical And Electronic Engineering Yamaguchi University
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Matsuba Motoko
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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KIKUCHI Yukiko
o NTT LSI Laboratories
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YABE Hideki
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (ASET), c
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AYA Sunao
o NTT LSI Laboratories
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TAKEUCHI Nobuyuki
o NTT LSI Laboratories
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Kumada Teruhiko
Advanced Tech. R/d Center Mitsubishi Electric Corp.
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MORIIZUMI Kouichi
Kitaitami Works, Mitsubishi Electric Corp.,
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KAMIYAMA Kinya
Kitaitami Works, Mitsubishi Electric Corp.,
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KISE Koji
Semiconductor Research Laboratory, Mitsubishi Electric Corp.,
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Kamiyama K
Mitsubishi Electric Corp. Hyogo Jpn
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Morizumi K
Mitsubishi Electric Corp. Hyogo Jpn
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Suzuki M
Department Of Electronics Graduate School Of Engineering Tohoku University
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Saito K
Akita Univ. Akita Jpn
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Deguchi K
Department Of Electronics And Information Systems Osaka University
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KIKUCHI Noribumi
Central Research Institute, Mitsubishi Materials Corporation
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HIFUMI Takasi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Hifumi Takasi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Tsuboi Shinzo
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Matsui Yasuji
Aset Super-fine Sr Lithography Laboratory
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YOSHIOKA Nobuyuki
ULSI Laboratory, Mitsubishi Electric Corporation
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MATUSI Yasuji
Product Development Laboratory, Mitsubishi Electric Corporation
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Kikuchi Noribumi
Central Research Institute Mitsubishi Materials Corporation
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Watakabe Yaichiro
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Takeuchi N
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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Yoshioka N
Shizuoka Univ. Hamamatsu Jpn
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Yoshioka Nobuyuki
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Saito Keisuke
Application Laboratory Bruker Axs
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
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Saito Kaichi
Kanagawa Industrial Technology Center
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Aoyama Hajime
ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan
著作論文
- Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
- Fine Pattern Etching of W-Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas
- Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
- Performance of X-Ray Stepper for Next-Generation Lithography
- Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
- Proximity Effect Correction for 1:1 X-Ray Mask Fabrication
- Sputtered W-Ti Film for X-Ray Mask Absorber
- Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
- Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks
- Improvement of Pattern and Position Accuracies by Multiple Electron Beam Writing for X-Ray Mask Fabrication
- Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement