AYA Sunao | Advanced Technology R&D Center, Mitsubishi Electric Corporation

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概要

• 同名の論文著者
• Advanced Technology R&D Center, Mitsubishi Electric Corporationの論文著者

関連著者

• YABE Hideki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• AYA Sunao

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• KISE Koji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• MARUMOTO Kenji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Aya Sunao

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Yabe Hideki

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Marumoto K

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Aya S

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Yabe H

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Marumoto Kenji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kitamura K

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kise Koji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• KITAMURA Kaeko

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• AMI Shigeto

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Kitamura Kaeko

  Advanced Technology R&D Center, Mitsubishi Electric Corporation,

• Ami Shigeto

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Kitamura Kaeko

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Sasaki K

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Sasaki Kei

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• MATSUI Yasuji

  Advanced Technology R&D Center, Mitsubishi Electric Corp.

• Shoki Tsutomu

  R&d Center Hoya Corporation

• SATOH Shin-ichi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• HIFUMI Takasi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Hifumi Takasi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• SHOKI Tsutomu

  R&D center, HOYA Corporation

• OHKUBO Ryo

  R&D center, HOYA Corporation

• SAKURAI Tadashi

  Electro-Optics Company, HOYA Corporation

• KAWAHARA Takamitsu

  R&D center, HOYA Corporation

• ANNAKA Norimichi

  Electro-Optics Company, HOYA Corporation

• Matsui Yasuji

  O Ntt Lsi Laboratories

• Ohkubo R

  Hoya Corp. Tokyo Jpn

• Sakurai Tadashi

  Electro-optics Company Hoya Corporation

• Annaka Norimichi

  Electro-optics Company Hoya Corporation

• Kawahara Takamitsu

  R&d Center Hoya Corporation

• Satoh Shin-ichi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

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著作論文

• A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
• Stress Stability of W-Ti X-Ray Absorber in Patterning Process
• An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
• Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing
• Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks
• An Ultralow Stress Ta_4B Absorber for X-Ray Masks

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