Yabe Hideki | Advanced Technology R&d Center Mitsubishi Electric Corporation
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概要
関連著者
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Aya Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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AYA Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Aya S
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kitamura Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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Kitamura Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Sasaki Kei
Advanced Technology R&d Center Mitsubishi Electric Corporation
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KITAMURA Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Ami Shigeto
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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AMI Shigeto
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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ITOGA Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Itoga Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
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Aya Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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Kise Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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Sasaki K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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MATSUI Yasuji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Shoki Tsutomu
R&d Center Hoya Corporation
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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AMEMIYA Mitsuaki
Nanotechnology & Advanced System Research Laboratories, Canon Incorporated
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MARUMOTO Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Marumoto Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Hirai Yoshihiko
College Of Engineering Osaka Prefecture Univirsity
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SATOH Shin-ichi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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HIFUMI Takasi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Hifumi Takasi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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SHOKI Tsutomu
R&D center, HOYA Corporation
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OHKUBO Ryo
R&D center, HOYA Corporation
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SAKURAI Tadashi
Electro-Optics Company, HOYA Corporation
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KAWAHARA Takamitsu
R&D center, HOYA Corporation
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ANNAKA Norimichi
Electro-Optics Company, HOYA Corporation
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Matsui Yasuji
O Ntt Lsi Laboratories
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Amemiya Mitsuaki
Nanotechnology & Advanced System Research Laboratories Canon Incorporated
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Ohkubo R
Hoya Corp. Tokyo Jpn
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Sakurai Tadashi
Electro-optics Company Hoya Corporation
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Annaka Norimichi
Electro-optics Company Hoya Corporation
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Kawahara Takamitsu
R&d Center Hoya Corporation
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Satoh Shin-ichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Tanaka Yoshio
College Of Engineering Graduate School Of Osaka Prefecture University
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Yabe Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan
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Yabe Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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Yoshida Satoshi
College of Engineering, Graduate School of Osaka Prefecture University, 1-1 Gakuencho, Sakai, Osaka 539-8531, Japan
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Takagi Nobuyuki
College of Engineering, Graduate School of Osaka Prefecture University, 1-1 Gakuencho, Sakai, Osaka 539-8531, Japan
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Yamamoto Kazuhiro
Material Technology Department, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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Hirai Yoshihiko
College of Engineering, Graduate School of Osaka Prefecture University, 1-1 Gakuencho, Sakai, Osaka 539-8531, Japan
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Sumitani Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan
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Sasaki Kei
Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan
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Tanaka Yoshio
College of Engineering, Graduate School of Osaka Prefecture University, 1-1 Gakuencho, Sakai, Osaka 539-8531, Japan
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Sasaki Kei
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
著作論文
- A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
- Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask
- 50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
- Stress Stability of W-Ti X-Ray Absorber in Patterning Process
- Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing
- Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks
- An Ultralow Stress Ta_4B Absorber for X-Ray Masks
- An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
- High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold
- A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask