Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks

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Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
Fine Pattern Etching of W-Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas
X-Ray Mask Fabrication Process Using Cr Mask and ITO Stopper in the Dry Etching of W Absorber
Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography
Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
Defect Printability for 100 nm Patterns in X-Ray Lithography
Performance of X-Ray Stepper for Next-Generation Lithography
Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask
50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
A New Cleaning Technique for X-Ray Masks in Alkaline Solutions by Direct Control of Electrochemical Potential
Proximity Effect Correction for 1:1 X-Ray Mask Fabrication
Sputtered W-Ti Film for X-Ray Mask Absorber
Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
Stress Stability of W-Ti X-Ray Absorber in Patterning Process
An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing
Influence of Optical Parameters of Synchrotron Radiation Lithography Beamline on Pattern Replication
Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks
Control of X-Ray Beam Fluctuation in Synchrotron Radiation Lithography Beamline
Improvement of Pattern and Position Accuracies by Multiple Electron Beam Writing for X-Ray Mask Fabrication
Characterization of Solid Oxide Fuel Cell Components by Gas Permeability Measurement
An Ultralow Stress Ta_4B Absorber for X-Ray Masks
Estimation of Trabecular Bone Axis for Characterization of Cancellous Bone Using Scattered Ultrasonic Wave
Ultrasonic Scattering Study of Cancellous Bone for Osteoporosis Diagnosis
Transport Properties of a Resistively-Coupled Single-Electron Transistor
Transport Properties of a Resistively-Coupled Single-Electron Transistor
Transport Properties of Resistively-Coupled Single-Electron Transistor
An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
Theoretical Analysis on Mechanical Deformation of Membrane-Based Photomask Blanks
High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold
A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask

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