Yabe H | Advanced Technology R&d Center Mitsubishi Electric Corporation
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概要
関連著者
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Aya S
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Matsui Yasuji
O Ntt Lsi Laboratories
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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AYA Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Aya Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sasaki K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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MATSUI Yasuji
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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YABE Hideki
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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AYA Sunao
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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MARUMOTO Kenji
Central Research Laboratory, Mitsubishi Electric Corporation
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YABE Hideki
Central Research Laboratory, Mitsubishi Electric Corporation
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Fujino Takeshi
Wood Research Institute, Kyoto University
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Fujino T
Information Technology R&d Center Mitsubishi Electric Corporation:communication Systems R&d
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Fujino T
Wood Research Institute Kyoto University
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Fujino Takeshi
Department Of Electric And Electronic Engineering Ritsumeikan University
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Yabe Hideki
Central Research Laboratory Mitsubishi Electric Corp.
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Watakabe Y
Mitsubishi Electric Corp. Itami
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Matsui Yasuji
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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KITAMURA Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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AMI Shigeto
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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SASAKI Kei
Manufacturing Development Laboratory, Mitsubishi Electric Corporation
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MATSUI Yasuji
Central Research Laboratory, Mitsubishi Electric Corp.
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Matsui Yasuji
Central Research Laboratory Mitsubishi Electric Corp.
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YOSHIOKA Nobuyuki
ULSI Laboratory, Mitsubishi Electric Corporation
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Yoshioka N
Shizuoka Univ. Hamamatsu Jpn
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Kitamura Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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Ami Shigeto
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Kitamura Kaeko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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WATANABE Hiroshi
Super-fine SR Lithography Laboratory, Association of Super-Advanced Electronics Technologies(ASET),
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FUJINO Takeshi
ULSI Laboratory, Mitsubishi Electric Corporation
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Okada Ikuo
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) C
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Kikuchi Y
Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn
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Kikuchi Yukiko
Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories
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Kikuchi Yukiko
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Sasaki Kei
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Minami Hiroyuki
Optoelectronic And Microwave Devices Laboratory Mitsubishi Electric Corporation
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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FUJINO Takeshi
LSI R&D Laboratory, Mitsubisi Electric Corporation
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WATAKABE Yaichiro
LSI R&D Laboratory, Mitsubisi Electric Corporation
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YOSHIOKA Nobuyuki
LSI Laboratory, Mitsubishi Electric Corporation
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WATAKABE Yaichiro
LSI Laboratory, Mitsubishi Electric Corporation
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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MATSUBA Motoko
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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WATAKABE Yaichiro
ULSI R & D Laboratory, Mitsubishi Electric Corporation
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FUJINO Takeshi
LSI Laboratory, Mitsubishi Electric Corporation
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Minami Hiroyuki
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corp.
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Fujino Takeshi
Ulsi Laboratory Mitsubishi Electric Corporation
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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ITOGA Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MATSUI Yasuji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MARUMOTO Kenji
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies
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Yamashita Hiroaki
Central Research Institute Mitsubishi Materials Corporation
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MATSUI Yasuji
o NTT Telecommunications Energy Laboratories
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YOSHIOKA Nobuyuki
LSI R&D Lab, Mitsunishi Electric Corporation
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Muto Y
The Institute For Materials Research Tohoku University
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Matsuba Motoko
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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MARUMOTO Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KIKUCHI Yukiko
o NTT LSI Laboratories
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YABE Hideki
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (ASET), c
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AYA Sunao
o NTT LSI Laboratories
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TAKEUCHI Nobuyuki
o NTT LSI Laboratories
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Itoga Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Marumoto Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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MORIIZUMI Kouichi
Kitaitami Works, Mitsubishi Electric Corp.,
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KAMIYAMA Kinya
Kitaitami Works, Mitsubishi Electric Corp.,
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KISE Koji
Semiconductor Research Laboratory, Mitsubishi Electric Corp.,
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AYA Sunao
Central Research Laboratory, Mitsubishi Electric Corporation
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Kamiyama K
Mitsubishi Electric Corp. Hyogo Jpn
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Morizumi K
Mitsubishi Electric Corp. Hyogo Jpn
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Fujino Takeshi
Lsi Laboratory Mitsubishi Electric Corporation
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KIKUCHI Noribumi
Central Research Institute, Mitsubishi Materials Corporation
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SATOH Shin-ichi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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HIFUMI Takasi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Hifumi Takasi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Kikuchi Noribumi
Central Research Institute Mitsubishi Materials Corporation
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Watakabe Yaichiro
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Watakabe Yaichiro
Lsi Laboratory Mitsubishi Electric Corporation
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Yoshioka Nobuyuki
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Yoshioka Nobuyuki
Lsi Laboratory Mitsubishi Electric Corporation
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Satoh Shin-ichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
著作論文
- A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
- Fine Pattern Etching of W-Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas
- X-Ray Mask Fabrication Process Using Cr Mask and ITO Stopper in the Dry Etching of W Absorber
- 50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
- Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
- Proximity Effect Correction for 1:1 X-Ray Mask Fabrication
- Sputtered W-Ti Film for X-Ray Mask Absorber
- Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
- Stress Stability of W-Ti X-Ray Absorber in Patterning Process
- Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing
- Electron Beam Writing Techniques for Fabricating Highly Accurate X-Ray Masks
- Improvement of Pattern and Position Accuracies by Multiple Electron Beam Writing for X-Ray Mask Fabrication