Watanabe H | Advanced Technology R&d Center Mitsubishi Electric Corporation
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概要
関連著者
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Watanabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe H
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Watanabe Hiroshi
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Sumitani H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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WATANABE Hiroshi
Advanced Science Research Center, Japan Atomic Energy Research Institute
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SUMITANI Hiroaki
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Marumoto K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Itoga Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sumitani Hiroaki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Watanabe Hiroshi
Advanced Lsi Technology Labs Toshiba Corp.
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ITOGA Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MARUMOTO Kenji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Marumoto Kenji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Matsui Yasuji
O Ntt Lsi Laboratories
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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WATANABE Hiroshi
Super-fine SR Lithography Laboratory, Association of Super-Advanced Electronics Technologies(ASET),
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Inoue M
Setsunan Univ. Osaka Jpn
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Fujita K
Oki Electric Industry Co. Ltd. Tokyo
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Fujita K
Department Of Material Chemistry Graduate School Of Engineering Kyoto University
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Kikuchi Y
Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn
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Kikuchi Yukiko
Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories
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Kikuchi Yukiko
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Inoue M
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Inoue M
Kyoto Univ. Kyoto Jpn
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WATANABE Hideyuki
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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WATANABE Heiji
Joint Research Center for Atom Technology, Angstrom Technology Partnership (JRCAT-ATP), c
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ICHIKAWA Masakazu
Joint Research Center for Atom Technology, Angstrom Technology Partnership (JRCAT-ATP), c
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Watanabe Hirohito
Institute Of Material Science University Of Tsukuba
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Watanabe H
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Inoue Masataka
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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Watanabe H
Semiconductor Leading Edge Technol. Inc. Yokohama Jpn
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Ishida M
Sii Nanotechnology Inc.
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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YABE Hideki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KISE Koji
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Ichikawa Masakazu
Joint Research Center For Atom Technology
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Ichikawa Masakazu
Joint Research Center For Atom Technology Angstrom Technology Partnership
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Ichikawa Masakazu
Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C
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Ichikawa Mitsuru
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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WATANABE Hajime
ULSI Laboratory, Mitsubishi Electric Corporation
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HIFUMI Takashi
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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INOUE Masami
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MARUMOTO Kenji
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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Fujita K
Univ. Tokyo Tokyo Jpn
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Yabe H
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Yabe Hideki
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Hifumi T
Advanced Technology R&d Center Mitsubishi Electric Corp.
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IWASA Masayuki
SII Nanotechnology Inc.
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Kise Koji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Watanabe Hideo
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Watanabe Heiji
Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp)
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Iwasa Masayuki
Sii Nanotechnology Inc. Tokyo Jpn
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Hifumi Takashi
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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Watanabe Hisashi
Department of Cardiology, The Jikei University School of Medicine
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Hokama A
Control And Prevention Of Infectious Diseases Department Of Medicine And Therapeutics Faculty Of Med
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Hokama Akira
琉球大学 医学部感染病態制御学
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中山 喜萬
阪大工
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OHKI Shigehisa
NTT Advanced Technology Corp.
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MOROSAWA Tetsuo
NTT LSI Laboratories
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Ohki S
Ntt Telecommunications Energy Laboratories
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Morosawa Tetsuo
Ntt Telecommunications Energy Laboratories
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EZAKI Mizunori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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NAKAYAMA Yoshinori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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KIKUCHI Yukiko
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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TSUBOI Shinji
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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WATANABE Hiroshi
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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AOYAMA Hajime
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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MATSUI Yasuji
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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OHKI Shigehisa
NTT Telecommunications Energy Laboratories
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SAITO Kenichi
NTT Telecommunications Energy Laboratories
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MATSUDA Tadahito
NTT Telecommunications Energy Laboratories
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MATSUDA Tadahito
NTT System Electronics Laboratories
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KAWAMURA Takaaki
Department of Mathematics and Physics, University of Yamanashi
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SAITO Keisuke
Application Laboratory
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Okada Ikuo
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) C
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Saito Keisuke
Application Laboratory Analytical Division Philips Japan Ltd.
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Saito K
Institute Of Industrial Science University Of Tokyo
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Aoyama H
Aset Super-fine Sr Lithography Laboratory
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Aoyama Hajime
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Aoyama Hajime
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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Ezaki M
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Inoue M
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Fujita Shinobu
O National Institute For Advanced Interdisciplinary Research (nair)
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MARUNO Shigemitsu
Joint Research Center for Atom Technology, Angstrom Technology Partnership (JRCAT-ATP), c
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FUJITA Ken
o National Institute for Advanced Interdisciplinary Research (NAIR)
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Hokama Akira
The First Department Of Internal Medicine Faculty Of Medicine University Of The Ryukyus
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SUITA Muneyoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Saito Kenichi
Institute Of Industrial Science University Of Tokyo
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Nakayama Yoshinori
Aset Super-fine Sr Lithography Laboratory
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MATSUI Yoshio
Environmental Pollution Research Institute of Nagoya City
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MATSUI Yasuji
Super-Fine SR Lithography Laboratory, Association of Super-Advanced Electronics Technologies
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OHSAWA Hiroshi
Nanotechnology Research Center, Canon Inc.
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SAITOH Kenji
Nanotechnology Research Center, Canon Inc.
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KUMADA Teruhiko
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MATSUI Yasuji
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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MATSUI Yasuji
o NTT Telecommunications Energy Laboratories
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Aya S
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Saito Kunio
Ntt Microsystem Integration Laboratories
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Muto Y
The Institute For Materials Research Tohoku University
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Ohsawa H
Toshiba Corp. Kawasaki Jpn
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AMEMIYA Mitsuaki
Nanotechnology & Advanced System Research Laboratories, Canon Incorporated
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MARUMOTO Sunao
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KIKUCHI Yukiko
o NTT LSI Laboratories
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YABE Hideki
Super-fine SR Lithography Lab., Association of Super-Advanced Electronics Technologies (ASET), c
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AYA Sunao
o NTT LSI Laboratories
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TAKEUCHI Nobuyuki
o NTT LSI Laboratories
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OGUSHI Nobuaki
Nanotechnology Research Center, Canon Inc.
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MIZUSAWA Nobutoshi
Nanotechnology Research Center, Canon Inc.
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UDA Koji
Nanotechnology Research Center, Canon Inc.
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FUJITA Ken
Joint Research Center for Atom Technology, Angstrom Technology Partnership (JRCAT-ATP)
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Uda Koji
Nanotechnology Research Center Canon Inc.
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Ogushi Nobuaki
Nanotechnology Research Center Canon Inc.
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Marumoto Sunao
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kumada Teruhiko
Advanced Tech. R/d Center Mitsubishi Electric Corp.
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Kitamura K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawamura Takaaki
Department Of Mathematics And Physics University Of Yamanashi
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Kawamura Takaaki
Department Of Physics Yamanashi University
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Saito K
Akita Univ. Akita Jpn
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Suita Muneyoshi
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Tsuboi Shinzo
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Maruno Shigemitsu
Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C
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Amemiya Mitsuaki
Nanotechnology & Advanced System Research Laboratories Canon Incorporated
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AOYAMA Hidetake
Department of Electrical Engineering, Faculty of Engineering, Gunma University
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Matsui Yasuji
Aset Super-fine Sr Lithography Laboratory
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MATUSI Yasuji
Product Development Laboratory, Mitsubishi Electric Corporation
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Saito Keisuke
Application Laboratory Bruker Axs
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Kawamura Takaaki
Department Of Applied Physics School Of Science And Engineering Waseda University
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Saitoh Kenji
Nanotechnology Research Center Canon Inc.
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Mizusawa Nobutoshi
Nanotechnology Research Center Canon Inc.
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Saito Kaichi
Kanagawa Industrial Technology Center
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Aoyama Hajime
ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan
著作論文
- Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
- Electron-Beam-Induced Selective Thermal Decomposition of Ultrathin SiO_2 Layers Used in Nanofabrication
- Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography
- Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
- Defect Printability for 100 nm Patterns in X-Ray Lithography
- Pattern Resolution in X-ray Lithography Using Pattern Replication Technique on a Mask
- 50 nm Pattern Printing by Narrowband Proximity X-Ray Lithography
- Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
- Critical Dimension Control in Synchrotron Radiation Lithography Using a Negative-Tone Chemical Amplification Resist
- Layer-by-Layer Oxidation of Si(001) Surfaces
- Performance of SR Lithography in Giga-bit DRAM Fabrication
- Analytical Description of Partially Coherent Optical Systems for Optimization of Numerical Aperture and Degree of Coherence