Properties of Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Ru(EtCp)_2 with Tetrahydrofuran Solvent

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-11-15

著者

• Hiratani M

  Central Research Laboratory Hitachi Ltd.

• Hiratani M

  Central Research Laboratory Hitachi Ltd

• Hiratani Masahiko

  Central Research Laboratory Hitachi Ltd.

• Nabatame Toshihide

  Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva

• Nabatame T

  Aist Tsukuba Jpn

• Nabatame Toshihide

  Mirai-aset Advanced Industrial Science And Technology (aist)

• Nabatame Toshihide

  Hitachi Research Laboratory Hitachi Ltd.

• Suzuki T

  Hitachi Research Laboratory Hitachi Ltd.

• Suzuki T

  Nagaoka Univ. Technol.

• SUZUKI Takaaki

  Hitachi Research Laboratory of Hitachi Ltd.

• Suzuki Tatsuya

  Graduate School Of Engineering Yokohama National University

• OHJI Yuzuru

  Semiconductor Leading Edge Technologies, Inc. (Selete)

• Matsui Yasushi

  Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat

• ASANO Isamu

  ELPIDA MEMORY, Inc.

• Matsui Y

  Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn

• Matsui Y

  Nims Tsukuba Jpn

• MATSUI Yuichi

  Central Research Laboratory, Hitachi, Ltd.

• MATSUI Yoshio

  Environmental Pollution Research Institute of Nagoya City

• SHIMAMOTO Yasuhiro

  Central Research Laboratory, Hitachi, Ltd.

• KADOSHIMA Masaru

  Hitachi Research Laboratory, Hitachi Ltd.

• ASANO Isamu

  Semiconductor & Integrated Circuits Division, Hitachi Ltd.

• FUJIWARA Tetsuo

  Hitachi Research Laboratory, Hitachi Ltd.

• Matsui Y

  Central Research Laboratory Hitachi Ltd.

• Muto Y

  The Institute For Materials Research Tohoku University

• Ohji Yuzuru

  Semiconductor & Integrated Circuits Division Hitachi Ltd.

• Kadoshima Masaru

  Hitachi Research Laboratory Hitachi Ltd.

• Fujiwara Tetsuo

  Hitachi Research Laboratory Hitachi Ltd.

• Shimamoto Yasuhiro

  Central Research Laboratory Hitachi Ltd.

• Asano I

  Elpida Memory Inc. Kanagawa Jpn

• Shimamoto Y

  Hitachi Ltd. Tokyo Jpn

• MATUSI Yasuji

  Product Development Laboratory, Mitsubishi Electric Corporation

• Nabatane Toshihide

  Hitachi Research Laboratory, Hitachi Ltd.

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