Degradation Mechanism of HfAlO_x/SiO_2 Stacked Gate Dielectric Films through Transient and Steady State Leakage Current Analysis

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• 岡田 健治

  半導体MIRAI-ASET

• Yasuda Naoki

  Mirai-aset Aist

• Nabatame Toshihide

  Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva

• Nabatame T

  Aist Tsukuba Jpn

• Nabatame Toshihide

  Mirai-aset Advanced Industrial Science And Technology (aist)

• Nabatame Toshihide

  Mirai Project Association Of Super-advanced Electronics Technology (aset)

• Ota Hiroyuki

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Okada K

  Yamaguchi Univ. Yamaguchi Jpn

• Tominaga Koji

  Mirai-aset Aist

• Toriumi Akira

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Toriumi A

  Univ. Tokyo Tokyo Jpn

• Toriumi Akira

  The Authors Are With Advanced Lsi Technology Laboratory Toshiba Corporation:presently With The Depar

• Toriumi Akira

  Advanced Lsi Technology Toshiba Corporation

• 岡田 健治

  松下電器産業(株)

• MIZUBAYASHI Wataru

  MIRAI-ASRC

• Yasuda Naoki

  Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.

• OKADA Kenji

  MIRAI-ASET, AIST

• HORIKAWA Tsuyoshi

  MIRAI-ASRC, AIST

• Toriumi Akira

  Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc

• HISAMATSU Hirokazu

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET)

• IWAMOTO Kunihiko

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET)

• SATAKE Hideki

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET)

• YAMAMOTO Katsuhiko

  MIRAI-ASET, AIST

• Hisamatsu Hirokazu

  Mirai-aset Aist

• Toriumi Akira

  Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.

• Satake Hideki

  Mirai Association Of Super-advanced Electronics Technologies (aset)

• Hayashi T

  Mirai-asrc-aist

• Horikawa Tsuyoshi

  Mirai Project Association Of Super-advanced Electronics Technology (aset)

• Satake Hideki

  Mirai-aset Aist

• Ota Hiroyuki

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Iwamoto Kunihiko

  Mirai-aset

• Toriumi Akira

  Mirai-asrc Aist

• Yamamoto Katsuhiko

  Mirai-aset Aist

• Horikawa Tsuyoshi

  Mirai-asrc Aist

• Mizubayashi Wataru

  MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan

• Tominaga Koji

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan

• Yasuda Naoki

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan

• Ota Hiroyuki

  MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan

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