Nabatame Toshihide | Mirai Project Association Of Super-advanced Electronics Technology (aset)
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概要
関連著者
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Nabatame Toshihide
Mirai Project Association Of Super-advanced Electronics Technology (aset)
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Nabatame Toshihide
Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva
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Toriumi Akira
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Nabatame T
Aist Tsukuba Jpn
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Nabatame Toshihide
Mirai-aset Advanced Industrial Science And Technology (aist)
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Toriumi Akira
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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Toriumi A
Univ. Tokyo Tokyo Jpn
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Toriumi Akira
The Authors Are With Advanced Lsi Technology Laboratory Toshiba Corporation:presently With The Depar
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Toriumi Akira
Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.
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Ota Hiroyuki
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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Ota Hiroyuki
MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan
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Kadoshima Masaru
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Toriumi Akira
Mirai-asrc Aist
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Nabatame Toshihide
Hitachi Research Laboratory Hitachi Ltd.
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Toriumi Akira
Advanced Lsi Technology Toshiba Corporation
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Wang Wenwu
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Ota Hiroyuki
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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IKEDA Minoru
MIRAI-ASET
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Satake Hideki
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Ikeda Minoru
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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SHIMOGAKI YUKIHIRO
Department of Chemical Engineering, University of Tokyo
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KADOSHIMA Masaru
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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IWAMOTO Kunihiko
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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Toriumi Akira
Department Of Materials Engineering The University Of Tokyo
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Horikawa Tsuyoshi
Mirai Project Association Of Super-advanced Electronics Technology (aset)
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SHIMOGAKI Yukihiro
Department of Materials Engineering, The University of Tokyo
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HORIKAWA Tsuyoshi
MIRAI-ASRC, AIST
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SATAKE Hideki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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Wang W
National Tainan Teachers Coll. Tainan Twn
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Shimogaki Yukihiro
Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo
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Shimogaki Y
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Satake Hideki
Mirai-aset Aist
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Shimogaki Yukihiro
Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo,
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MISE Nobuyuki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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OGAWA Arito
MIRAI-ASET
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Hayashi T
Mirai-asrc-aist
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Horikawa Tsuyoshi
Mirai-asrc Aist
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Shimogaki Yukihiro
Univ. Tokyo Tokyo Jpn
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Migita Shinji
MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan
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Tominaga Koji
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Ogawa Arito
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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岡田 健治
半導体MIRAI-ASET
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Yasuda Naoki
Mirai-aset Aist
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Toriumi Akira
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Okada K
Yamaguchi Univ. Yamaguchi Jpn
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Tominaga Koji
Mirai-aset Aist
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岡田 健治
松下電器産業(株)
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AKIYAMA Koji
MIRAI-ASET
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MIZUBAYASHI Wataru
MIRAI-ASRC
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OKADA Kenji
MIRAI-ASET, AIST
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MIGITA Shinji
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scie
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Kresse Georg
Institut Fur Materialphysik Univeisitat Wien
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Miyata Noriyuki
Mirai Project Advanced Semiconductor Research Center (asrc)
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Iwamoto Kunihiko
Mirai-aset
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Nabatame Toshihide
Superconductivity Research Laboratory International Superconductivity Technology Center
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Toriumi Akira
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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Toriumi Akira
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-0046, Japan
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Mizubayashi Wataru
MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan
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Akiyama Koji
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Yasuda Naoki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Haneji Nobuo
Division Of Electrical And Computer Engineering Faculty Of Engineering Yokohama National University
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Yasuda Tetsuji
Mirai Project Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industria
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Fujiwara Hideaki
Mirai-aset Aist
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Morita Yukinori
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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Ichikawa Masakazu
Mirai Project Advanced Semiconductor Research Center (asrc)
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Migita Shinji
Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial
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TAKAHASHI Masashi
MIRAI-ASET
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Mise Nobuyuki
Mirai-aset Aist
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Nabatame Toshihide
MIRAI-ASET, AIST, Tsukuba West 7, 16-1 Onogawa, Tsukuba, 305-8569, Japan
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Morita Yukinori
MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan
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Ohta Akio
Graduate School Of Advanced Sciences Of Matter Hiroshima University
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Haneji Nobuo
Division Of Electrical And Computer Engineering Yokohama National University
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Toriumi A
Mirai Project Advanced Semiconductor Research Center (asrc)
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Ohno Morifumi
National Institute of Advanced Industrial Science and Technology
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SAITO Yukio
Hitachi Research Laboratory, Hitachi Ltd.
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WANG Wenwu
MIRAI-ASRC
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Yasuda Naoki
Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.
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HISAMATSU Hirokazu
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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MIYATA Noriyuki
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and
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YAMAMOTO Katsuhiko
MIRAI-ASET, AIST
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Hisamatsu Hirokazu
Mirai-aset Aist
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大野 守史
沖セミコンダクター(株)
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Miyazaki Seiichi
Graduate School Of Advanced Sciences And Matters Hiroshima University
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Hirano Akito
Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva
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Ohno Morifumi
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Ohno Morifumi
Mirai-aset Aist
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TAKABA Hiroyuki
MIRAI-ASET, AIST
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NISHIZAWA Masayasu
MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industr
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Takaba Hiroyuki
Mirai-aset Aist
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大野 守史
静岡大学電子工学研究所
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Hirabayashi Izumi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Nishizawa Masayasu
Mirai Project Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industria
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大野 守史
(株) ソルテック
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KOIKE Shuichi
Superconductivity Research Laboratory, International Superconductivity Technology Center
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NABATAME Toshihide
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Kobrin Paul
Rockwell International Science Center
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Cheung Jeffery
Rockwell International Science Center
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Yamamoto Katsuhiko
Mirai-aset Aist
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Koike S
Superconductivity Research Laboratory International Superconductivity Technology Center
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Saito Yukio
Hitachi Research Laboratory Hitachi Ltd.
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Hirabayashi Izumi
Superconductivity Research Laboratory (SRL), International Superconductivity Technology Center (ISTEC), 1-10-13 Shinonome, Koto-ku, Tokyo 135-0062, Japan
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Shimogaki Yukihiro
Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
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Shimogaki Yukihiro
Department of Materials Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Shimogaki Yukihiro
Department of Materials Engineering, School of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Mise Nobuyuki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Satake Hideki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Nabatame Toshihide
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Nabatame Toshihide
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Kadoshima Masaru
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Migita Shinji
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-0046, Japan
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Migita Shinji
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Nishimura Tomoaki
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-0046, Japan
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Tominaga Koji
MIRAI, Association of Super-Advanced Electronics Technologies, AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Miyata Noriyuki
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Morita Yukinori
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Yasuda Naoki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Yasuda Naoki
MIRAI, Association of Super-Advanced Electronics Technologies, AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Ota Hiroyuki
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Ota Hiroyuki
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-0046, Japan
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Toriumi Akira
MIRAI, Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Iwamoto Kunihiko
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), AIST Tsukuba SCR Building, Tsukuba, Ibaraki 305-8569, Japan
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Iwamoto Kunihiko
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Haneji Nobuo
Division of Electrical and Computer Engineering, Yokohama National University, 79-1 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan
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Toriumi Akira
MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 4, Tsukuba, Ibaraki 305-8562, Japan
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Nabatame Toshihide
MIRAI-ASET, AIST, Tsukuba West 7, 16-1 Onogawa, Tsukuba 305-8569, Japan
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Nabatame Toshihide
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), AIST Tsukuba West 7, Tsukuba, Ibaraki 305-8569, Japan
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Horikawa Tsuyoshi
MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), AIST Tsukuba West 7, Tsukuba, Ibaraki 305-8569, Japan
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Wang Wenwu
Department of Materials Engineering, School of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Miyata Noriyuki
MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 4, Tsukuba, Ibaraki 305-8562, Japan
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Miyazaki Seiichi
Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan
著作論文
- Anomalous positive V_ shift in HfAlO_x MOS gate stacks
- Comparative Studies on Oxygen Diffusion Coefficients for Amorphous and γ-Al_2O_3 Films using ^O Isotope
- Comparative Studies on Oxygen Diffusion Coefficients for Amorphous and γ-Al2O3 Films using 18O Isotope
- Degradation Mechanism of HfAlO_x/SiO_2 Stacked Gate Dielectric Films through Transient and Steady State Leakage Current Analysis
- Impact of Surface Hydrophilicization prior to Atomic Layer Deposition for HfO_2/Si Direct-Contact Gate Stacks
- Impact of Initial Traps on TDDB and NBTI Reliabilities in High-k Gate Dielectrics
- Si-Capped Annealing of HfO_2-based Dielectrics for Suppressing Interface Layer Growth and Oxygen Out-Diffusion
- The first principles calculations of Fermi level pinning in FUSI/PtSi/HfO_2/Si system induced by local distortion of HfO_2
- Theoretical analysis of the Fermi level pinning in HfO_2/Si system induced by the interface defect states
- Gate Depletion Effect Reduction and Flat-band Voltage Control in Poly-Si/HfAlO_x MOSFETs with Nanometer TaN Dots at the Top Interface
- Effects of Aluminum and Nitrogen Profile Control on Electrical Properties of HfAlON Gate Dielectric MOSFETs
- Theoretical Analysis of Interstitial Boron Diffusion and Its Suppression Mechanism with Nitrogen in Amorphous HfO_2
- Flat-band Voltage Tunability and No Depletion Effect of Poly-Si Gate CMOS with Nanometer-size Metal Dots at the Poly-Si/Dielectric Interface
- Electrical and Thermal Stability Characteristics of HfCN Films as Metal Gate-Electrode Synthesized by Metalorganic Chemical Vapor Deposition
- High Temperature Annealing-Induced Phase Transformation Characteristic of Nitrogen-Rich Hafnium Nitride Films
- Physical and Electrical Characteristics of HfN Metal Gate Electrode Synthesized by Post-Rapid Thermal Annealing-assisted MOCVD
- Fabrication of Hf(C)N Films on SiO_2 by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor
- The Fabrication of Hafnium Nitride by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor for Gate-Electrode Application
- Thermal Stability of a Thin HfO_2/Ultrathin SiO_2/Si Structure : Interfacial Si Oxidation and Silicidation
- Preparation and Transport Properties of TlBa_2Ca_2Cu_3O_y Thin Films by Metalorganic Deposition
- Properties of Tl_2Ba_2Ca_1Cu_2O_x Thin Films Prepared on Polycrystalline Yttria-Stabilized Zirconia Substrate with a T_c of 106 K and a J_c of 1.7×10^4 A/cm^2 by Dual-Magnetron Sputtering and Post Annealing
- Silicon-Atom Induced Fermi-Level Pinning of Fully Silicided Platinum Gates on HfO2 Dielectrics
- Study on Oxynitride Buffer Layers in HfO2 Metal–Insulator–Semiconductor Structures for Improving Metal–Insulator–Semiconductor Field-Effect Transistor Performance
- The Fabrication of Hafnium Nitride by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor for Gate-Electrode Application
- Low-Threshold-Voltage HfOxN p-Channel Metal–Oxide–Semiconductor Field-Effect Transistors with Partially Silicided Platinum Gate Electrode
- Performance Improvement of HfAlOxN n-Channel Metal–Oxide–Semiconductor Field-Effect Transistors by Controlling the Bonding Configuration of Nitrogen Atoms Coordinated to Hf Atoms
- Fabrication of Hf(C)N Films on SiO2 by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor
- Thermal Stability of a Thin HfO2/Ultrathin SiO2/Si Structure: Interfacial Si Oxidation and Silicidation
- Electrical and Thermal Stability Characteristics of HfCN Films as Metal Gate-Electrode Synthesized by Metalorganic Chemical Vapor Deposition