Importance of Leakage Current Noise Analysis for Accurate Lifetime Prediction of High-k Gate Dielectrics

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• 岡田 健治

  半導体MIRAI-ASET

• Ota Hiroyuki

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Okada K

  Yamaguchi Univ. Yamaguchi Jpn

• Toriumi Akira

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Toriumi A

  Univ. Tokyo Tokyo Jpn

• Toriumi Akira

  The Authors Are With Advanced Lsi Technology Laboratory Toshiba Corporation:presently With The Depar

• Sasaki Takaoki

  Semiconductor Leading Edge Technologies Inc.

• Sasaki Takaoki

  Semiconductor Leading Edge Technologies (selete) Aist

• 岡田 健治

  松下電器産業(株)

• OOTSUKA Fumio

  Semiconductor Leading Edge Technologies Inc.

• OKADA Kenji

  MIRAI-ASET, AIST

• HORIKAWA Tsuyoshi

  MIRAI-ASRC, AIST

• TAMURA Yasuyuki

  Semiconductor Leading Edge Technologies (Selete), AIST

• AOYAMA Tomonori

  Semiconductor Leading Edge Technologies (Selete), AIST

• Toriumi Akira

  Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc

• Toriumi Akira

  Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.

• Hayashi T

  Mirai-asrc-aist

• Horikawa Tsuyoshi

  Mirai Project Association Of Super-advanced Electronics Technology (aset)

• Ootsuka Fumio

  Semiconductor Leading Edge Technologies (selete) Aist

• Ota Hiroyuki

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Tamura Yasuyuki

  Semiconductor Leading Edge Technologies (selete) Aist

• Aoyama Tomonori

  Semiconductor Company Toshiba Corporation

• Aoyama Tomonori

  Semiconductor Leading Edge Technologies (selete) Aist

• Toriumi Akira

  Mirai-asrc Aist

• Horikawa Tsuyoshi

  Mirai-asrc Aist

• Toriumi Akira

  Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

• Ota Hiroyuki

  MIRAI Project, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Sciences and Technology (AIST), Tsukuba West, Tsukuba, Ibaraki 305-8569, Japan

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