ASANO Isamu | ELPIDA MEMORY, Inc.
スポンサーリンク
概要
関連著者
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ASANO Isamu
ELPIDA MEMORY, Inc.
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Asano Isamu
Elpida Memory Inc.
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Hiratani M
Central Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd
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Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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NAKAMURA Yoshitaka
ELPIDA MEMORY, Inc.
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Matsui Y
Nims Tsukuba Jpn
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MATSUI Yuichi
Central Research Laboratory, Hitachi, Ltd.
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MATSUI Yoshio
Environmental Pollution Research Institute of Nagoya City
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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Asano I
Elpida Memory Inc. Kanagawa Jpn
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MATUSI Yasuji
Product Development Laboratory, Mitsubishi Electric Corporation
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Nakamura Yoshitaka
Elpida Memory Inc.
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Nabatame Toshihide
Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva
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Nabatame T
Aist Tsukuba Jpn
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Nabatame Toshihide
Mirai-aset Advanced Industrial Science And Technology (aist)
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Nabatame Toshihide
Hitachi Research Laboratory Hitachi Ltd.
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Suzuki T
Hitachi Research Laboratory Hitachi Ltd.
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Suzuki T
Nagaoka Univ. Technol.
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SUZUKI Takaaki
Hitachi Research Laboratory of Hitachi Ltd.
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Suzuki Tatsuya
Graduate School Of Engineering Yokohama National University
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OHJI Yuzuru
Semiconductor Leading Edge Technologies, Inc. (Selete)
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Fukuda Naoki
Semiconductor Group Hitachi Ltd.
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AOKI Hideo
Device Development Center, Hitachi Ltd.
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YAMADA Satoru
ELPIDA MEMORY, Inc.
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SEKIGUCHI Toshihiro
ELPIDA MEMORY, Inc.
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Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Sekiguchi Toshihiro
Elpida Memory Inc.
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SHIMAMOTO Yasuhiro
Central Research Laboratory, Hitachi, Ltd.
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KADOSHIMA Masaru
Hitachi Research Laboratory, Hitachi Ltd.
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ASANO Isamu
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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FUJIWARA Tetsuo
Hitachi Research Laboratory, Hitachi Ltd.
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Muto Y
The Institute For Materials Research Tohoku University
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Ohji Yuzuru
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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Kadoshima Masaru
Hitachi Research Laboratory Hitachi Ltd.
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Goto Hidekazu
Elpida Memory Inc.
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Fujiwara Tetsuo
Hitachi Research Laboratory Hitachi Ltd.
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Shimamoto Yasuhiro
Central Research Laboratory Hitachi Ltd.
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KAWAGOE Tsuyoshi
Elpida Memory, Inc.
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KUROKI Keiji
Elpida Memory, Inc.
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NAKANISHI Naruhiko
Elpida Memory, Inc.
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Kuroki Keiji
Elpida Memory Inc.
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Shimamoto Y
Hitachi Ltd. Tokyo Jpn
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Kawagoe Tsuyoshi
Elpida Memory Inc.
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Nakanishi Naruhiko
Elpida Memory Inc.
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Yamada Satoru
Elpida Memory Inc. Device Development Center Hitachi Ltd.
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Aoki Hideo
Device Development Center Hitachi Ltd.
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Yamada Satoru
Elpida Memory Inc.
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Nabatane Toshihide
Hitachi Research Laboratory, Hitachi Ltd.
著作論文
- A Thermally Robust Ti-Rich TiNx Contact Metallization Realizing and Interconnect System Suitable to 0.10-μm DRAMs and Beyond
- Properties of Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Ru(EtCp)_2 with Tetrahydrofuran Solvent
- A 500℃ fabrication process for MIM capacitors-based on a Ta_2O_5/Nb_2O_5 bilayer with high permittivity-for DRAM and SoC applications
- Novel Storage-Node Contacts with Stacked Point-Cusp Magnetron Sp-TiN Barrier for Metal-Insulator-Metal Ru/Ta_2O_5/Ru Capacitors in Gigabit Dynamic Random Access Memories