X-Ray Photoelectron Spectroscopy and Electrical Characteristics of Na_2S-Passivated GaAs Surface : Comparison with (NH_4)_2S_x-Passivation
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概要
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X-ray photoelectron spectroscopic (XPS) analysis was performed for the Na_2S-passivated GaAs surface. The XPS data indicated that oxidation of GaAs was not suppressed by Na_2S passivation, and fair amounts of AS_2O_3 and Ga_2O_3 were observed after exposure to air for 3 days in contrast with the case of (NH_4)_2S_x passivation. However, segregation of elemental arsenic was found to be substantially suppressed by this passivation. Both As_x S_y (probably AsS) and AS_2S_3 were observed at the Na_2S-passivated surface. This is due to diffusion of elemental As through the thick Na_2S film and its reaction with S to produce As_xS_y and As_2S_3, and this is probably the mechanism of suppression of As segregation. After an exposure to air, the XPS signal from As_xS_y substantially decreased. This is probably due to the reaction of As_xS_y→As_2O_3+SO_2↑. The XPS measurement for the (NH_4)_3S_x-passivated GaAs samples indicated that oxidation was strongly suppressed, but segregation of elemental As was not effectively suppressed by this passivation, consistent with the previous data. As-S bonds were found to disappear upon annealing after (NH_4)_2S_x passivation. Elemental sulfur was observed after the exposure to air for 3 days for the (NH_4)_2S_x-passivated samples. This may be due to breakdown of both As-S and Ga-S bonds accompanying oxidation of As and Ga. Schottky diodes were fabricated on the substrates treated in various ways, and I-V characteristies were measured. From the point of view of degradation due to air exposure, the best result was obtained for the (NH_4)_2S_x-passivated sample with annealing.
- 社団法人応用物理学会の論文
- 1993-08-15
著者
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Ikoma Hideaki
Faculty Of Science And Technology Science University Of Tokyo
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SAKATA Minoru
Faculty of Science and Technology, Science University of Tokyo
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Sakata Minoru
Faculty Of Science And Technology Science University Of Tokyo
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SATO Kenji
Faculty of Science and Technology, Science University of Tokyo
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Sato Kenji
Faculty Of Science And Technology Science University Of Tokyo
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