Fabrication of c-Axis Oriented Pb(Zr, Ti)O_3 Thin Films on Si(100) Substrates Using MgO Intermediate Layer

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概要

• 論文の詳細を見る

• Tetragonal perovskite Pb(Zr_xTi_<1-x>)O_3 (PZT) ferroelectric thin films with single c-axis orientation were successfully fabricated on Si(100) substrates using an intermediate layer of MgO thin film. The (100) oriented MgO intermediate layers can be prepared on Si(100) substrates with low growth rate during RF magnetron sputtering at a substrate temperature of 300℃. On the (100) oriented MgO intermediate layer, PZT can be deposited using a digital Metalorganic chemical vapor deposition (MOCVD) method at 480℃. By analysis of cross sections of the PZT/MgO/Si(100) stacked structure using focused ion beam observation, it is clearly shown that a uniform MgO layer causes the deposited PZT film to consist of a uniform tetragonal perovskite phase. However, a nonniform MgO layer causes the PZT film to contain an additional phase because of direct contact between PZT and the Si substrate.

• 社団法人応用物理学会の論文
• 1996-08-15

著者

• Kurihara Koji

  Faculty Of Technology Tokyo University Of Agricuture And Technology

• UENO Tomo

  Faculty of Technology, Tokyo University of Agriculture and Technology

• Ueno T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Kamisako K

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Kuroiwa K

  Faculty Of Technology Tokyo University Of Agricuture And Technology

• SENZAKI Junji

  Faculty of Technology, Tokyo University of Agriculture and Technology

• KUROIWA Koichi

  Faculty of Technology, Tokyo University of Agriculture and Technology

• Senzaki Junji

  Faculty Of Technology Tokyo University Of Agricuture And Technology

• MITSUNAGA Osamu

  Faculty of Technology, Tokyo University of Agricuture and Technology

• UCHIDA Takahito

  Faculty of Technology, Tokyo University of Agriculture and Technology

• Ueno Tomo

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Uchida Takahito

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Mitsunaga Osamu

  Faculty Of Technology Tokyo University Of Agricuture And Technology

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