Hihg-Density Nanoetchpit-Array Fabrication on Si Surface Using Ultrathin SiO_2 Mask

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-09-15

著者

• 遠藤 康夫

  高エ研

• 大泊 巌

  早大理工

• Endoh Yasuo

  Core Research For Evolutional Science And Technology (jrcat) : Department Of Physics Tohoku Universi

• Endoh Yasuo

  Physics Department Granduate School Of Science Tohoku University

• 大泊 巌

  早稲田大学理工学術院

• Ohdomari Iwao

  Kagami Memorial Laboratory For Material Science And Technology Waseda University

• Ohdomari Iwao

  School Of Science And Engineering Waseda University:kagami-memorial Laboratory For Materials Science

• Ohdomari Iwao

  School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science

• Ando Yuji

  Department Of Applied Physics The University Of Tokyo

• Goto Tomomi

  Department of Toxicology, Aichi Prefectural Institute of Public Health

• Goto T

  Graduate School Of Pharmaceutical Sciences Tohoku University

• Goto Takaaki

  Department Of Electric Engineering Tokyo University Of Agriculture And Technology

• Endoh Yasuo

  Institute For Materials Research Tohoku University

• Endoh Yasuo

  Physics Department Tohoku University

• Ando Yoshinori

  Department of Physics, Meijo University

• KOH Meishoku

  Kagami Memorial Laboratory for Materials Science and Technology, Waseda University

• SHINADA Takahiro

  Department of Electronics, Information and Communication Engineering, School of Science and Engineer

• SAWARA Souichi

  Department of Electronics, Information and Communication Engineering, School of Science and Engineer

• Koh Meishoku

  Kagami Memorial Laboratory For Materials Science And Technology Waseda University

• Sawara Souichi

  Department Of Electronics Information And Communication Engineering School Of Science And Engineerin

• Ando Y

  Tokyo Univ. Information Sci. Chiba Jpn

• 大泊 巌

  早大

• Shinada T

  Department Of Chemistry Nagaoka University Of Technology

• 後藤 俊夫

  Imram Tohoku University

• 大泊 巌

  早大・理工

• Ando Yoshinori

  Department Of Information Systems Faculty Of Business Administration And Information Science Tokyo U

• Endoh Yasuo

  Crest Japan Science And Technology Corporation (jst)

• Ando Yoshinori

  Department Of Applied Physics Faculty Of Engineering Nagoya University

• Shinada Takahiro

  Department of Chemistry, Nagaoka University of Technology

• KOH Meishoku

  Kagami Memorial Laboratory for Material Science and Technology, Waseda University

• Goto Tomomi

  Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan

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