Preparation and Properties of a-SiGe:H:F Films by a Glow Discharge Decomposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-12-20
著者
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Tarui Hisaki
New Materials Research Center, Sanyo Electric Co., Ltd.
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Tarui Hisaki
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
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Nakamura N
Tokyo Inst. Technol. Yokohama Jpn
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HAKU Hisao
New Materials Research Center, Sanyo Electric Co,. Ltd.
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HISHIKAWA Yoshihiro
New Materials Research Center, Sanyo Electric Co., Ltd.
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FUKATSU Takeo
Research Center, Sanyo Electric Co., Ltd.
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NAKAYAMA Shoichiro
Research Center, Sanyo Electric Co., Ltd.
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TSUDA Shinya
Research Center, Sanyo Electric Co., Ltd.
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KUWANO Yukinori
Research Center, Sanyo Electric Co., Ltd.
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Nakamura Noboru
Functional Materials Research Center Sanyo Electric Co. Ltd.
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TAKAHAMA Tsuyoshi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Nishiwaki Hidenori
New Materials Research Center Sanyo Electric Co. Ltd.
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Nishiwaki Hidenori
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Watanabe Katsuyuki
National Research Institute For Metals : Department Of Material Science And Technology Science Unive
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OSUMI Masato
SANYO Electric Co., Ltd.
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NAKANO Shoichi
Research Center, SANYO Electric Co., Ltd.
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NAKAMURA Noboru
Research Center, SANYO Electric Co., Ltd.
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NAKASHIMA Yukio
Research Center, SANYO Electric Co., Ltd.
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NISHIWAKI Hidenori
Research Center, SANYO Electric Co., Ltd.
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Nakamura N
Department Of Information Processing Tokyo Institute Of Technology
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Watanabe K
Department Of Physics Tokyo University Of Science
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TARUI Hisaki
Research Center, SANYO Electric Co., Ltd.
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HAKU Hisao
Research Center, SANYO Electric Co., Ltd.
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DOHJO Hiroshi
Research Center, SANYO Electric Co., Ltd.
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WATANABE Kaneo
Research Center, SANYO Electric Co., Ltd.
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HISHIKAWA Yoshihiro
Research Center, SANYO Electric Co., Ltd.
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TAKAHAMA Tsuyoshi
Research Center, SANYO Electric Co., Ltd.
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OHNISHI Michitoshi
Research Center, SANYO Electric Co., Ltd.
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DOHJOH Hiroshi
Functional Materials Research Center, SANYO Electric Co., Lid.
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Haku Hisao
New Materials Research Center Sanyo Electric Co . Ltd.
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Dohjoh Hiroshi
Functional Materials Research Center Sanyo Electric Co. Lid.
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Fukatsu Takeo
Research Center Sanyo Electric Co. Ltd.
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NAKASHIMA Yukio
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Kuwano Y
Technical Res. Lab. Kawasaki Jpn
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Kuwano Yukinori
Research And Development Center Sanyo Electric Co. Ltd.
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Ohnishi Michitoshi
Sony Corporation Research Center
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Hishikawa Y
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakashima Y
Sumitomo Sitix Corp. Saga Jpn
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Takahama Tsuyoshi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Wakisaka K
Sanyo Electric Co. Ltd. Hirakata‐shi Jpn
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WATANABE Ken-ichi
Institute for Nuclear Study, University of Tokyo
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Hishikawa Yoshihiro
Research Center for Photovoltaic Technologies, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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