Development of High Voltage Photovoltaic Micro-Devices for Driving Micro Actuators (Special Issue on Micromachine Technology)

概要

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Photovoltaic devices capable of generating more than 200 volts with an area of 1cm^2 have been developed for directly driving microactuators such as piezoelectric or electrostatic actuators. The micro-devices interconnect 285 micro cells (unit cell size: about 0.5mm×2.0mm) in series, and have an open circuit voltage (V_ltOCgt) of 207 volts, a short circuit current (I_ltscgt) of 36.6μA, a maximum output power (P_ltmaxgt) of 4.65mW and a fill factor (F. F.) of 0.615 under AM (Air Mass) 1.5 and 100mW/cm^2 illumination. This voltage is the highest in the world for the area of 1cm^2. The series connection is precisely processed by a focused laser beam, thereby significantly reducing the area needed for device connections. It has been confirmed that a piezoelectric polymer can be directly driven by the electrical output in evaluating the potential of the devices to be used as a microactuator's power source.
社団法人電子情報通信学会の論文
1997-02-25