Epitaxial AlN Thin Films Grown on α-Al_2O_3 Substrates by ECR Dual Ion Beam Sputtering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-09-30
著者
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USUKI Tatsuro
New Materials Research Center, SANYO Electric Co., Ltd.
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SHIBATA Kenichi
New Materials Research Center, SANYO Electric Co., Ltd.
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Usuki T
Sanyo Electric Co. Ltd. Osaka Jpn
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Usuki T
New Materials Research Center Sanyo Electric Co. Ltd.
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Usuki Tatsuro
New Materials Research Center Sanyo Electric Co. Ltd.
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Tanaka N
Nagoya Univ. Nagoya Jpn
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Shibata K
New Materials Research Center Sanyo Electric Co. Ltd.
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Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Shibata Kenichi
New Material Research Center Sanyo Electric Co. Ltd.
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TANAKA Naoki
New Materials Research Center, SANYO Electric Co., Ltd.
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OKANO Hiroshi
New Materials Research Center, SANYO Electric Co., Ltd.
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KOBAYASHI Masami
New Materials Research Center, SANYO Electric Co., Ltd.
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Okano H
Applied Materials Japan Inc. Chiba Jpn
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Tanaka N
Applied Physics Department Graduate School Of Engineering Nagoya University
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Kobayashi Masami
New Materials Research Center Sanyo Electric Co. Ltd.
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