GHz-Barud Surface Acoustic Wave Devices Using Aluminum Nitride Thin Films Deposited by Electron Cyclotron Resonance Dual Ion-Beam Sputtering
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概要
- 論文の詳細を見る
AIN thin films have been deposited on basal plane ((001)Al_2O_3) and R-plane ((11^^-2)Al_2O_3) sapphire by an ECR dual ion-beam sputtering method. The (001) plane of AIN was epitaxially grown on (001)Al_2O_3. On the other hand, it was found that the (001) plane of AIN was deposited on (11^^-2)Al_2O_3 with an inclination of about 26 degrees against the substrate, and a surface wave having high coupling and high velocity (6684 m/s) was excited on this substrate. Resonator-type 1.67 GHz band SAW filters have been fabricated using AIN thin film deposited on (11^^-2)Al_2O_3. The insertion loss, suppression and TCD were 7.9 dB, more than 20 dB and 35 ppm/℃, respectively. These are the best values yet in a GHz band SAW filter based on AIN thin film, and are good enough to allow practical use.
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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NAKANO Shoichi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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SHIBATA Kenichi
New Materials Research Center, SANYO Electric Co., Ltd.
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SHIBATA Kenichi
Functional Materials Research Center, Sanyo Electric Co.
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Nakano Shoichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakano S
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
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Nakano S
東海大学医学部生理科学教室
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Nakano Shoichi
Sanyo Electric Co. Ltd.
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Nakano Shoichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Shibata K
New Materials Research Center Sanyo Electric Co. Ltd.
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Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Shibata Kenichi
New Material Research Center Sanyo Electric Co. Ltd.
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TANAKA Naoki
New Materials Research Center, SANYO Electric Co., Ltd.
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Okano H
Applied Materials Japan Inc. Chiba Jpn
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Tanaka N
Applied Physics Department Graduate School Of Engineering Nagoya University
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OKANO Hiroshi
Functional Materials Research Center, SANYO Electric Co., Ltd.
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TANAKA Naoki
Functional Materials Research Center, SANYO Electric Co., Ltd.
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