Preparation of a-Si and a-Si-Alloy Films Using an Ion-Gun Chemical Vapor Deposition Method
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-07-15
著者
-
SAYAMA Katsunobu
Functional Materials Research Center, Sanyo Electric Co., Ltd.
-
TSUDA Shinya
Functional Materials Research Center, Sanyo Electric Co., Ltd.
-
NAKANO Shoichi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
-
Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
-
Tsuda Shinya
R&d Headquarters Sanyo Electric Co. Ltd.
-
HAKU Hisao
New Materials Research Center, Sanyo Electric Co,. Ltd.
-
KUWANO Yukinori
Functional Materials Research Center, Sanyo Electric Co., Ltd.
-
Nakano Shoichi
Sanyo Electric Co. Ltd.
-
Nakano Shoichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
-
Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
-
Sayama Katsunobu
New Materials Research Center Sanyo Electric Co. Ltd.
-
OSUMI Masato
SANYO Electric Co., Ltd.
-
HAKU Hisao
Functional Materials Research Center, SANYO Electric Co., Lid.
-
Yamano K
Sanyo Electric Co. Ltd. Gifu Jpn
-
Haku Hisao
New Materials Research Center Sanyo Electric Co . Ltd.
-
MATSUOKA Tsugufumi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
-
Kuwano Y
Technical Res. Lab. Kawasaki Jpn
-
OHNISHI Michitoshi
Functional Materials Research Center, SANYO Electric Co., Ltd.
-
Ohnishi Michitoshi
Sony Corporation Research Center
-
Kouzuma Shinichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
-
Sayama Katsunobu
Functional Materials Research Center Sanyo Electric Co. Ltd.
-
Tsuda Shinya
Functional Materials Research Center, SANYO Co., Ltd., 1-18-13 Hashiridani, Hirakata City, Osaka 573
-
Kuwano Yukinori
Functional Materials Research Center, SANYO Co., Ltd., 1-18-13 Hashiridani, Hirakata City, Osaka 573
-
Ohnishi Michitoshi
Functional Materials Research Center, SANYO Co., Ltd., 1-18-13 Hashiridani, Hirakata City, Osaka 573
関連論文
- 904 レーザーアブレーションを利用したクラスター生成装置におけるレーザー誘起衝撃波の解析
- 18pTD-9 時空間局在型クラスター源SCCSによるサイズ制御シリコンクラスター生成
- 時空間局所閉じ込め型クラスタービーム源の開発
- 24pYN-2 シリコンクラスタービーム生成における分光分析
- 24pA-4 内部状態の揃ったクラスター生成源の開発(II)
- 26pB-4 内部状態を規定したクラスター生成源の開発
- Effect of Composition on the Properties of Amorphous Silicon Carbide at a Certain Optical Gap
- Optimization of a-SiGe:H Alloy Composition for Stable Solar Cells
- Low-Hydrogen-Content, Stable Amorphous Silicon Thin Films Prepared by Ion-Assisted Method
- Film Property Control of Hydrogenated Amorphous Silicon Germanium for Solar Cells
- 28a-S-8 ショック波を利用したレーザー蒸発型クラスター生成の原理
- 28a-S-2 高精度クラスター実験のための20KeV原子クラスターイオン生成
- 2a-YE-7 レーザー蒸発クラスター源における高密度局在原子層の1次元ガスダイナミクス
- 27p-Q-12 デンドリマー分子の長時間エネルギー貯蔵の可能性
- 第17回日本熱物性シンポジウム : 特別セッション(C)薄膜・微小領域の熱物性/熱測定パネルディスカッション
- 28pXD-12 超音速シリコンクラスタービーム a-C 及び金属表面デポジッション
- OA1 金属バルクおよび薄膜の過渡反射格子応答の解析(超音波物性)
- Effect of Organic Phase on Dynamic and Collective Behavior of Surfactants at Liquid/Liquid Interfaces by a Time-Resolved Quasi-Elastic Laser-Scattering Method
- Thermal Lens Microscope
- Picosecond Energy Transfer at Gold/Electrolyte Interfaces Using Transient Reflecting Grating Method under Surface Plasmon Resonance Condition
- Analysis of Serum Proteins Adsorbed to a Hemodialysis Membrane of Hollowfiber Type by Thermal Lens Microscopy
- Direct Measurements of Femtosecond Energy Dissipation Processes of Hot Electrons in a Gold Film
- 31a-ZH-9 フェムト秒過渡反射格子法によるAu薄膜内ホットエレクトロンの輸送現象
- 分析化学の進歩(7)光熱変換分光法--生体関連物質の高感度分析への応用
- 化学実験の集積化とナノ流体輸送 (1998年の化学-3-)
- OC2 短パルスレーザー光による液面での高周波超音波励起(光-超音波エレクトロニクス)
- 8a-Q-1 液中レーザープラズマ生成による特異な誘導ラマン散乱(3): 波数シフトによる放射の機構の考察
- 7p-J-8 過渡反射法で観測する水/白金界面の超高速エネルギー移動
- 8a-Q-1 液中レーザープラズマ生成による特異な誘導ラマン散乱(3) : 波数シフトによる放射の機構の考察
- パルス紫外レーザー誘起キャピラリー振動法のポリマー溶液キャピラリー電気泳動法への適用による無修飾DNA断片の高感度検出(「特集」キャピラリー電気泳動法の新展開)
- 分子を数える(創立100周年記念ミクロの世界)
- レーザー光熱変換分光法を用いる超微量免疫測定
- 28a-YK-7 混合溶媒中のレーザーブレイクダウンプラズマ生成に伴う誘導ラマン散乱の異常増強
- 28a-YK-7 混合溶媒中のレーザーブレイクダウンプラズマ生成に伴う誘導ラマン散乱の異常増強
- 液中レーザーブレイクダウンプラズマ生成による特異な誘導ラマン散乱光の放射
- 過渡反射格子法を用いた表面・界面計測と高速光熱変換分光法
- 材料評価技術の最先端
- 長谷川佐一事務局長のご退任によせて
- Improvement of n-Type Poly-Si Film Properties by Solid Phase Crystallization Method
- Lateral Grain Growth of Poly-Si Films with a Specific Orientation by an Excimer Laser Annualing Method
- Development of New a-Si/c-Si Heterojunction Solar Cells: ACJ-HIT (Artificially Constructed Junction-Heterojunction with Intrinsic Thin-Layer)
- Effects of Substrate Surface Condition on a-Si Photovoltaic Characteristics : III-4: AMORPHOUS SOLAR CELLS (3) : Device Physics
- Microwave Dielectric Properties of CaO-Li_2O-Ln_2O_3-TiO_2 Ceramics
- Dielectric Characteristics of (A^_・A^_)TiO_3 Ceramics at Microwave Frequencies : Dielectric Properties
- Preparation and Characteristics of a Superconducting Base Transistor with an Au/Ba_K_xBiO_3/Niobium-Doped SrTiO_3 Structure
- Quantum Mechanical Transmission and Reflection of Quasi-Particles at Arbitrary Potential Barriers in the Superconducting Base Transistor
- Regulation of Heat Production of Brown Adipocytes via Typical and Atypical β-Adrenoceptors in the Rat
- Effect of the Adrenergic β_3-agonist, BRL37344, on Heat Production by Brown Adipocytes in Obese and in Older Rats
- High-Quality Wide-Gap Hydrogenated Amorphous Silicon Fabricated Using Hydrogen Plasma Post-Treatment
- Trapping and Recormbination of Photogenerated Carriers in As-Growrn High-Temperature-Annealed and Light-Soaked a-Si:H
- Dependence of Open Circuit Voltage of Amorphous Silicon Solar Cells on Thickness and Doping Level of the p-Layer
- A Newly Modified Isolation Method of Single Muscle Fibers : Especially Useful in Histological, Histochemical and Electron Microscopic Studies on Branched Fibers
- Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor
- Laser Patterning Method for Integrated Type a-Si Solar Cell Submodules
- Highly Accurate CO_2 Gas Sensor Using a Modulation-Type Pyroelectric Infrared Detector
- Modulation Type Pyroelectric IR Detector
- Preparation and Properties of a-SiGe:H:F Films by a Glow Discharge Decomposition
- Characteristics of AlN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Band Surface Acoustic Wave Devices
- High-Performance a-SiGe Solar Cells Using a Super Chamber Method
- Property Control for High-Quality Ba_K_xBiO_3 Epitaxial Thin Films Prepared by High-Pressure Reactive rf-Magnetron Sputtering
- Heterodyne Detection of Microwaves Using Granular-Type Y_1Ba_2Cu_3O_ Superconductors
- YBCO-BiO Composite Superconductor for Granular-Type Josephson Microwave Detector
- Fabrication and Properties of MgO/Bi_2Sr_2CaCu_2O_x Interfaces Using Crystalline and Amorphous MgO Films Grown by the MBE Method
- Preparation and Characterization of Nb/MgO/Bi_2Sr_2CaCu_2O_x Junctions Using the Cleavage Planes of a Single-Crystal Superconductor
- Transient Light-Induced ESR Investigations of the Role of Hydrogen in the Stability of a-Si:H
- High-Quality p-Type μc-Si Films Prepared by the Solid Phase Crystallization Method
- Preparation of High-Quality n-Type Poly-Si Films by the Solid Phase Crystallization (SPC) Method
- Improving the Uniformity of Poly-Si Films Using a New Excimer Laser Annealing Method for Giant-Microelectronics
- Stable, Metastable and Charged Dangling Bonds in Transient Light-Induced ESR of Undoped a-Si:H
- Irradiation-Temperature Dependence of the Light-Induced Effect in a-Si Solar Cells
- A Laser Welding and Scribing (LWS) Method for a High-Yield Integrated-Type a-Si Solar Cell
- Preparation of a-Si and a-Si-Alloy Films Using an Ion-Gun Chemical Vapor Deposition Method
- Interference-Free Determination of the Optical Absorption Coefficient and the Optical Gap of Amorphous Silicon Thin Films
- Amorphous Silicon-Carbon Alloy Prepared by the CMP (Controlled Plasma Magnetron) Method
- Microwave Detector Using Granular-Type YBCO Superconductors
- Preparation and Properties of a-Si Films Deposited at a High Deposition Rate under a Magnetic Field
- Preparation and Properties of a-SiGe:H Films Fabricated with a Super Chamber (Separated Ultra-High Vacuum Reaction Chamber)
- Preparation and Properties of High-Quality a-Si Films with a Super Chamber : Separated Ultra-High Vacuum Reaction Chamber
- Superlattice Structure a-Si Films Fabricated by the Photo-CVD Method and their Application to Solar Cells
- A New Analytical Method of Amorphous Silicon Solar Cells
- Light-Induced Effect of a-Si Films Fabricated Using the Super Chamber
- Effects of Swimming Exercise at Two Different Water Temperature on Hepatic Lipid and Lipoprotein Levels in Experimental Fatty Liver Rats
- Dependence of Lipid-Lipoprotein Metabolism on Exercise Intensity in Experimental Fatty Liver Rats
- High-Rate Deposition of a-Si:H Film with a Separated Plasma Triode Method
- Investigation of the Characteristics of a Piezoelectric Chopper for a Modulation-Type Pyroelectric Infrared Detector
- GHz-Barud Surface Acoustic Wave Devices Using Aluminum Nitride Thin Films Deposited by Electron Cyclotron Resonance Dual Ion-Beam Sputtering
- Preparation of c-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering
- Orientation Control of AlN Film by Electron Cyclotron Resonance Ion Beam Sputtering
- Properties of Yb-Ba-Cu-O Superconductors Prepared by a Plasma-Arc Melting and Rapid Quenching Method
- A New-Structure IR Gas Sensor
- Modulation Type Pyroelectric Infrared Sensor Using LiTaO_3 Single Crystal : P: Pyroelectrics
- A 2 kW Photovoltaic Power Generating System Using a-Si Solar Cells : II-3: SYSTEM AND ARRAY
- METABOLIC ADAPTATIONS TO ENDURANCE TRAINING MONITORED BY BLOOD LACTATE CONCENTRATION IN MALE RATS
- Effect of Time of Carbohydrate Ingestion on Muscle Glycogen Resynthesis after Exhaustive Exercise in Rats
- Effects of Endurance Training under Hyperoxia on Serum and Tissue Lipid Levels in Rats
- Effects of Long-Term Exercise and High-Cholesterol Diet on Lipid-Lipoprotein Metabolism in Rats
- Epitaxial Growth of Ba_K_xBiO_3 Thin Films by High-Pressure Reactive RF-Magnetron Sputtering
- Preparation of Lateral Isolation Structures by Controlling Bi or Ca Compositions in Bi-System Superconducting Films
- Preparation of T_c=109 K Bi-Sr-Ca-Cu-O Superconducting Thin Films from Amorphous Bi-O/Sr-Ca-Cu-O Structures
- Approach from a-Ge Films for Development of High-Quality a-SiGe Films