Preparation of High-Quality n-Type Poly-Si Films by the Solid Phase Crystallization (SPC) Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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TSUDA Shinya
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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NAKANO Shoichi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Tsuda Shinya
R&d Headquarters Sanyo Electric Co. Ltd.
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MATSUYAMA Takao
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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TANAKA Makoto
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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KUWANO Yukinori
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Nakano Shoichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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KISHI Yasuo
Functional Materials Research Center. Sanyo Electric Co., Ltd.
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Tanaka M
Toshiba Corp. Kawasaki Jpn
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Watanabe K
Department Of Physics Tokyo University Of Science
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Kishi Yasuo
Functional Materials Research Center Sanyo Electric Co. Ltd.
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WAKISAKA Kenichiro
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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MATSUOKA Tsugufumi
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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KAMEDA Masaaki
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Kuwano Y
Technical Res. Lab. Kawasaki Jpn
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Kameda Masaaki
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Wakisaka K
Sanyo Electric Co. Ltd. Hirakata‐shi Jpn
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Matsuyama Takao
Functional Materials Research Center Sanyo Electric Co. Ltd.
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KISHI Yasuo
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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Tsuda Shinya
Functional Materials Research Center, SANYO Co., Ltd., 1-18-13 Hashiridani, Hirakata City, Osaka 573
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Kuwano Yukinori
Functional Materials Research Center, SANYO Co., Ltd., 1-18-13 Hashiridani, Hirakata City, Osaka 573
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