Low-Hydrogen-Content, Stable Amorphous Silicon Thin Films Prepared by Ion-Assisted Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-10-15
著者
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Terakawa Akira
New Materials Research Center Sanyo Electric Co. Ltd.
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TSUDA Shinya
New Materials Research Center, Sanyo Electric Co., Ltd.
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Sayama Katsunobu
New Materials Research Center, Sanyo Electric Co., Ltd.
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Tarui Hisaki
New Materials Research Center, Sanyo Electric Co., Ltd.
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DE Subal
New Materials Research Center, Sanyo Electric Co., Ltd.
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MARUYAMA Eiji
New Materials Research Center, Sanyo Electric Co., Ltd.
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NINOMIYA Kunimoto
New Materials Research Center, Sanyo Electric Co., Ltd.
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NAKANO Shoichi
New Materials Research Center, Sanyo Electric Co., Ltd.
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Tsuda Shinya
New Materials Research Center Sanyo Electric Co . Ltd.
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Tsuda Shinya
Sanyo Electric Co. Ltd.
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De Subal
New Materials Research Center Sanyo Electric Co. Ltd.
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Tarui Hisaki
New Materials Research Center Sanyo Electric Co. Ltd.
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Tarui Hisaki
New Materials R. C. Sanyo Electric Co. Ltd.
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Maruyama E
New Materials Research Center Sanyo Electric Co. Ltd.
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Maruyama Eiji
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakano Shoichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakano S
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
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Nakano S
東海大学医学部生理科学教室
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Tsuda Shinya
R&d Headquarters Sanyo Electric Co. Ltd.
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Tsuda Shinya
New Materials R. C. Sanyo Electric Co. Ltd.
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Nakano Shoichi
Sanyo Electric Co. Ltd.
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Shibata K
New Materials Research Center Sanyo Electric Co. Ltd.
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Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Sayama Katsunobu
New Materials Research Center Sanyo Electric Co. Ltd.
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Ninomiya Kunimoto
New Materials Research Center Sanyo Electric Co. Ltd.
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Ninomiya Kunimoto
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Ninomiya K
Central Research Laboratory
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Kouzuma Shinichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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