Characteristics of AlN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Band Surface Acoustic Wave Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-05-30
著者
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NAKANO Shoichi
New Materials Research Center, Sanyo Electric Co., Ltd.
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SHIBATA Kenichi
New Materials Research Center, SANYO Electric Co., Ltd.
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Kobayashi Y
Tokai Univ. Kanagawa Jpn
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Nakano Shoichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakano S
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
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Nakano S
東海大学医学部生理科学教室
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Tanaka N
Nagoya Univ. Nagoya Jpn
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Kobayashi Y
Ntt Basic Research Lab. Kanagawa
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Kobayashi Y
Matsushita Electric Industrial Co. Ltd. Kyoto Jpn
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Nakano Shoichi
Sanyo Electric Co. Ltd.
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Shibata K
New Materials Research Center Sanyo Electric Co. Ltd.
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Kangawa Yoshihiro
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Shibata Kenichi
New Material Research Center Sanyo Electric Co. Ltd.
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Sayama Katsunobu
New Materials Research Center Sanyo Electric Co. Ltd.
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Kobayashi Y
Department Of Nuclear Engineering Graduate School Of Engineering
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KOBAYASHI Yasumi
New Materials Research Center, SANYO Electric Co., Ltd.
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TANAKA Naoki
New Materials Research Center, SANYO Electric Co., Ltd.
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OKANO Hiroshi
New Materials Research Center, SANYO Electric Co., Ltd.
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HIRAO Yasuhiro
New Materials Research Center, SANYO Electric Co., Ltd.
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Okano H
Applied Materials Japan Inc. Chiba Jpn
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Tanaka N
Applied Physics Department Graduate School Of Engineering Nagoya University
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Hirao Yasuhiro
New Materials Research Center Sanyo Electric Co. Ltd.
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Kouzuma Shinichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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