Comprehensive Study of Lateral Grain Growth in Poly-Si Films by Excimer Laser Annealing and Its Application to Thin Film Transistors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-10-15
著者
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Tsuda Shinya
New Materials Research Center Sanyo Electric Co . Ltd.
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Tsuda Shinya
Sanyo Electric Co. Ltd.
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Tsuda Shinya
R&d Headquarters Sanyo Electric Co. Ltd.
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KURIYAMA Hiroyuki
Sanyo Electric Co., Ltd.
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NOHDA Tomoyuki
Sanyo Electric Co., Ltd.
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KUWAHARA Takashi
Sanyo Electric Co., Ltd.
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KIYAMA Seiichi
Sanyo Electric Co., Ltd.
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AYA Yoichirou
Sanyo Electric Co., Ltd.
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WAKISAKA Kenichiro
Sanyo Electric Co., Ltd.
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Nohda Tomoyuki
Sanyo Electric Co. Ltd.
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Kiyama Seiichi
New Materials Research Center Sanyo Electric Co. Ltd.
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Sayama Katsunobu
New Materials Research Center Sanyo Electric Co. Ltd.
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Kuriyama Hiroyuki
Sanyo Electric Co. Ltd.:giant Electronics Technology Co. Ltd.
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Watanabe K
Department Of Physics Tokyo University Of Science
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Aya Yoichirou
Sanyo Electric Co. Ltd.
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Wakisaka K
Sanyo Electric Co. Ltd. Hirakata‐shi Jpn
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WATANABE Ken-ichi
Institute for Nuclear Study, University of Tokyo
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Kuwahara Takashi
Sanyo Electric Co. Ltd.
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Wakisaka Kenichiro
Sanyo Electric Co. Ltd. Osaka Jpn
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Kiyama Seiichi
Sanyo Electric Co. Ltd.:giant Electronics Technology Co. Ltd.
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Kouzuma Shinichi
Functional Materials Research Center Sanyo Electric Co. Ltd.
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