In Situ Transmission Electron Microseopy Observation of Single Crystallization of Filled Aluminum Interconnection

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-10-01

著者

• MORI Hirotaro

  Research Center for Ultrahigh Voltage Electron Microscopy, Osaka University

• Kaneko Hisashi

  Ulsi Research Laboratories Research And Development Center Toshiba Corporation

• Yasuda Hidehiro

  Research Center For Ultra-high Voltage Electron Microscopy Osaka University

• WADA Jun-ichi

  ULSI Process Engineering Laboratory, Microelectronics Engineering Laboratory

• Wada Jun-ichi

  Ulsi Research Laboratories Research And Development Center Toshiba Corporation

• Okano H

  Applied Materials Japan Inc. Chiba Jpn

• Wada Jun-ichi

  Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory

• Mori Hirotaro

  Research Center For Ultra-high Voltage Electron Microscopy Osaka University

• HAYASAKA Nobuo

  ULSI Research Center, Toshiba Corp.

• TOYODA Hiroshi

  ULSI Research Laboratories, Research and Development Center, Toshiba Corporation

• OKANO Haruo

  Technology Center, Applied Materials Japan

• HAYASAKA Nobuo

  Microelectronics Engineering Lab., Toshiba Corp.

• Hayasaka N

  Microelectronics Engineering Lab. Toshiba Corp.

• Hayasaka Nobuo

  Ulsi Research Center Toshiba Corp.

• Toyoda Hiroshi

  Ulsi Research Laboratories Research And Development Center Toshiba Corporation

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