Room Temperature Formation of Crystallized Palladium Silicide on Si(111) Observed by Ultrahigh Voltage Electron Microscopy : Surfaces, Interfaoes, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-03-15
著者
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MORI Hirotaro
Research Center for Ultrahigh Voltage Electron Microscopy, Osaka University
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OKADO Hideaki
Research Center for Ultrahigh Voltage Electron Microscopy, Osaka University
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SAKATA Takao
Research Center for Ultra-high Voltage Electron Microscopy, Osaka University
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Hirono S
Ibaraki Electrical Communications Lab.
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Mori H
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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Sakata T
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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Sakata Takao
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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Mori Hirotaro
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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HIRONO Shinsuke
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University
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UKEZONO Yoshinobu
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University
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Okado Hideaki
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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Hirono Shinsuke
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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Ukezono Yoshinobu
Research Center For Ultra-high Voltage Electron Microscopy Osaka University
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