Absolute Measurement of Lattice Spacing d(220) Silicon Crystal in Floating Zone
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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NAKAYAMA Kan
National Research Laboratory of Metrology
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Tanaka M
Production Engineering Research Laboratory Hitachi Ltd.
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Tanaka M
Mitsubishi Electric Co. Ltd. Hyogo Jpn
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Tanaka Michiko
Tokyo University Of Agiculture And Technology Department Of Biotechnology
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Tanaka M
New Materials Research Center Sanyo Electric Co. Ltd.
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Nakayama Kazuhiko
Mechanical Processing Technology Research Laboratories Kao Corporation
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Tanaka M
Manufacturing Development Center Mitsubishi Electric Corporation
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Tanaka M
Toshiba Corp. Kawasaki Jpn
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FUJIMOTO Hiroyuki
National Research Laboratory of Metrology
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TANAKA Mitsuru
National Research Laboratory of Metrology
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MISAWA Guento
National Research Laboratory of Metrology
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Tanaka M
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Fujimoto H
Daido Inst. Technol. Nagoya Jpn
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Nakayama K
National Inst. Advanced Industrial Technol. And Sci. Ibaraki Jpn
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Taino M
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Matsuzaki T
Department Of Applied Chemistry Faculty Of Engineering Himeji Institute Of Technology
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Fujimoto Hiroyuki
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
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