Formation of β-FeSi_2 Layers on Si(001) Substrates
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-01
著者
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Kumagai Y
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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SUEMASU Takashi
Institute of Applied Physics, University of Tsukuba
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HASEGAWA Fumio
Institute of Applied Physics, University of Tsukuba
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Tanaka M
Toshiba Corp. Kawasaki Jpn
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Kumagai Y
Hitachi Ltd. Ibaraki Jpn
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Kumagai Yoshinao
Institute Of Materials Science University Of Tsukuba
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TANAKA Masaya
Institute of Materials Science, University of Tsukuba
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