Comparison of Planar to Columnar Transformation of PtSi Layers on Si(001) and Si(111) Substrates in the Si Capping Layer Growth Process
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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Kumagai Y
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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HASEGAWA Fumio
Institute of Applied Physics, University of Tsukuba
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Hashimoto S
Texas Instruments Tsukuba R & D Center Ltd. Ibaraki Jpn
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PARK Kang-Ho
Basic Research Laboratory, Electronics and Telecommunications Research Institute
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HASHIMOTO Satoshi
Texas Instruments Tsukuba Research and Development Center, Limited
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Park Kang-ho
Basic Research Laboratory. Electronics And Telecommunications Research Institute. Yu-song P.o.
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Park Kang-ho
Telecommunication Basic Research Laboratory
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Park Kang-ho
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Kumagai Y
Hitachi Ltd. Ibaraki Jpn
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Kumagai Yoshinao
Institute Of Materials Science University Of Tsukuba
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ISHIMOTO Kouichi
Institute of Materials Science, University of Tsukuba
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PARK Kyung-ho
Texas Instruments Tsukuba Research & Development Center Ltd.
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HASEGAWA Fumio
Tohoku University of Art and Design
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Hashimoto S
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Park K‐h
Basic Research Laboratory. Electronics And Telecommunications Research Institute. Yu-song P.o.
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Park Kyung-ho
Texas Instruments Inc.
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Hasegawa Fumio
Institute Of Applied Physics University Of Tsukuba
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Ishimoto Kouichi
Institute Of Materials Science University Of Tsukuba:(present Address) Ibm Japan Ltd.
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Hashimoto Satoshi
Texas Instruments Tsukuba Research And Development Center Limited
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KUMAGAI Yoshinao
Institute of Material Science, University of Tsukuba
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HASEGAWA Fumio
Institlite of Materials Science, University of Tsukuba
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