Fabrication of a High-Throughput Cantilever-Style Aperture Tip by the Use of the Bird's-Beak Effect
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概要
- 論文の詳細を見る
A fabrication technique for a high-throughput cantilever-style aperture tip is described. Using the bird's-beak effect due to the stress caused by Si3N4 film in the field oxidation of silicon, we fabricated a near-field aperture with a diameter of about 100 nm which has a throughput of more than 1000 times that of the pyramidal pit.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Song Ki-bong
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Lee Sung-q
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Park Kang-ho
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Kim Junho
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Song Ki-Bong
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Yu-Song P.O.Box 106, Daejeon, Korea
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Park Kang-Ho
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Yu-Song P.O.Box 106, Daejeon, Korea
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Lee Sung-Q
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Yu-Song P.O.Box 106, Daejeon, Korea
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Kim Eun-Kyoung
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Yu-Song P.O.Box 106, Daejeon, Korea
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Kim Bun-Kyoung
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Yu-Song P.O.Box 106, Daejeon, Korea
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