Fabrication of Slider-Type Near-Field Arrayed Probe for Optical Data Storage
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概要
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A near-field optical slider has been prepared for a high-density recording system. The slider includes an array of high-throughput near-field probes and the surface-air bearing of the slider has been designed for a flying height of 20 nm. We have developed a prior-etching process for hollowing out the silicon oxide near-field optical tips. Bottom silicon underneath the arrayed tips and the inner silicon of the tips have been successfully removed for the optical path of visible light.
- 2005-05-15
著者
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Lee Sung-q
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Park Kang-ho
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Kim Eun-kyoung
Basic Research Laboratory Electronics And Telecommunications Research Institute
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Park Kang-Ho
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejon, Korea
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Lee Sung-Q
Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejon, Korea
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