In Situ Monitoring of Surface Kinetics in GaAs Atomic Layer Epitaxy by Surface Photo-Absorption Method
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概要
- 論文の詳細を見る
The epitaxial growth reactions that proceed on the substrate surface during halogen transport atomic layer epitaxy (ALE) are observed directly with a surface photo-absorption method. The heat of desorption (48.5 kcal/mol) is obtained from the reflective intensity change. The value agrees well with the activation energy reported in classical halogen transport vapor-phase epitaxy. Based on the observation, a reaction mechanism is proposed. The self-limiting mechanism of halogen transport ALE is ascribed to the complete coverage of surface As sites by the adsorbed complex.
- 社団法人応用物理学会の論文
- 1991-10-01
著者
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Suzuki Hiroshi
Department of Engineering and Applied Science, Faculty of Science and Technology, Sophia University
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Ikeda H
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Hashimoto S
Texas Instruments Tsukuba R & D Center Ltd. Ibaraki Jpn
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IKEDA Hitoshi
Department of Pathology/Pathophysiology, Division of Pathophysiological Science, Hokkaido University
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SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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IKEDA Hitoshi
Product Planning, Strategic Product Planning Department, Takeda Chemical Industries, Ltd.
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Suzuki Hiroshi
Department Of Allergy And Immunology National Research Institute For Child Health & Development
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Ikeda Hitoshi
Product Planning Strategic Product Planning Department Takeda Chemical Industries Ltd.
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Ikeda Hitoshi
Department Of Clinical Laboratory Medicine The University Of Tokyo
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IKEDA Hitoshi
Department of Animal Physiology, Faculty of Agriculture, Nagoya University
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