Low-Temperature Formation of the PtSi Layer by Codeposition of Pt and Si in a Molecular Beam Epitaxy System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-03-15
著者
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Kumagai Y
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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HASEGAWA Fumio
Institute of Applied Physics, University of Tsukuba
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Kumagai Y
Hitachi Ltd. Ibaraki Jpn
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Kumagai Yoshinao
Institute Of Materials Science University Of Tsukuba
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HASEGAWA Fumio
Tohoku University of Art and Design
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KANAYA Hiroyuki
Institute of Material Science, University of Tsukuba
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YAMAKA Eiso
Tsukuba College of Technology
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Hasegawa Fumio
Institute Of Applied Physics University Of Tsukuba
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Kanaya H
Institute Of Materials Science University Of Tsukuba
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Fujii Kunihiro
Institute of Materials Science, University of Tsukuba
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Kanaya H
Toshiba Corp. Yokohama Jpn
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FUJII Kunihiro
Institute of Material Science, University of Tsukuba
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KUMAGAI Yoshinao
Institute of Material Science, University of Tsukuba
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HASEGAWA Fumio
Institlite of Materials Science, University of Tsukuba
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