Effect of Substrate Temperature on the Crystalline State of Ba_2ErCu_3O_<7-x> Superconducting Thin Films by rf Magnetron Sputtering : Electrical Properties of Condensed Matter
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概要
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The crystalline state of the Ba_2ErCu_3O_<7-x> thin films deposited at various substrate temperatures by rf magnetron sputtering are investigated. The as-sputtered films deposited above 650℃ have a layered-perovskite structure which exhibits superconductivity by an annealing process in an oxygen flow. The annealed films have a better crystalline state and better superconducting properies than the films annealed after the deposition at lower substrate temperatures. The spatial distribution of the film composition across the thickness is also studied by Rutherford backscattering spectrometry.
- 社団法人応用物理学会の論文
- 1988-09-20
著者
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Kasai Y
Electrotechnical Laboratory
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YAMAKA Eiso
Tsukuba College of Technology
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Iguchi I
Department Of Physics Tokyo Institute Of Technology
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Iguchi Ienari
Institute Of Materials Science University Of Tsukuba
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MOCHIKU Takashi
Superconducting Materials Center, National Institute for Materials Science
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Mochiku T
Superconducting Materials Center National Institute For Materials Science
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Mochiku Takashi
Institute Of Materials Science University Of Tsukuba
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KANKE Yoko
Institute of Materials Science, University of Tsukuba
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YAMAKA Eiso
Institute of Materials Science, University of Tsukuba
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Wen Zhongmin
Institute Of Materials Science University Of Tsukuba
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