Preparation of Y-Ba-Cu-O Thin Films by Rf-Magnetron Sputtering
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概要
- 論文の詳細を見る
Thin films of Y-Ba-Cu-O compound are prepared by rf-magnetron sputtering technique. Superconductivity appears for those films annealed at 900-930℃. The best thin films exhibit superconducting onset at 86 K and complete zero resistance at 76 K. From the X-ray diffraction analysis, it is found that the films annealed at 920℃ have a strong c-axis orientation perpendicular to the film surface. The observed X-ray intensities are in good qualitative agreement with the calculated ones. The results of SEM and Auger electron spectroscopy are also presented.
- 社団法人応用物理学会の論文
- 1987-09-20
著者
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Asano Hajime
Instiiute Of Materials Science University Of Tsukuba
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Kasai Y
Electrotechnical Laboratory
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YAMAKA Eiso
Tsukuba College of Technology
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Ohkuma Haruo
Institute Of Materials Science University Of Tsukuba
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Iguchi I
Department Of Physics Tokyo Institute Of Technology
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Iguchi Ienari
Institute Of Materials Science University Of Tsukuba
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MOCHIKU Takashi
Superconducting Materials Center, National Institute for Materials Science
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Yokoyama Shin
Institute of Materials Science, University of Tsukuba
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Mochiku T
Superconducting Materials Center National Institute For Materials Science
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Mochiku Takashi
Institute Of Materials Science University Of Tsukuba
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KANKE Yoko
Institute of Materials Science, University of Tsukuba
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WEN Zhongmin
Institute of Materials Science, University of Tsukuba
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YAMAKA Eiso
Institute of Materials Science, University of Tsukuba
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Wen Zhongmin
Institute Of Materials Science University Of Tsukuba
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Yokoyama Shin
Institute Of Materials Science University Of Tsukuba
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