Growth Condition Dependence of Carbon Reduction in GaAs Chemical Beam Epitaxy Using Trisdimethylamimo-Arsine and Trimethylgallium
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-04-01
著者
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HASEGAWA Fumio
Institute of Applied Physics, University of Tsukuba
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MACHIDA Hideaki
Tri Chemical Laboratory Inc.
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Hasegawa Fumio
Institute Of Applied Physics University Of Tsukuba
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Ishikura K
Institute Of Materials Science University Of Tsukuba
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Ishikura Kouji
Institute Of Materials Science University Of Tsukuba
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TAKEUCHI Atsushi
Institute of Materials Science, University of Tsukuba
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KURIHARA Megumu
Tri Chemical Laboratory Inc.
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Machida Hideaki
Tri Chemical Laboratories Inc.
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Takeuchi Atsushi
Institute Of Materials Science University Of Tsukuba
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HASEGAWA Fumio
Institlite of Materials Science, University of Tsukuba
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Machida Hideaki
TRI Chemical Lab. Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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