Ni Precursor for Chemical Vapor Deposition of NiSi
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概要
- 論文の詳細を見る
Nickel thin film is an attractive material for use as electrodes or contacts of metal oxide semiconductor field effect transistors (MOSFETs), and numerous studies have focused on Ni monosilicide (NiSi). Bis-methylcyclopentadienyl-nickel [(MeCp)2Ni] is a dark green solid at room temperature, which becomes liquid at 36°C. Thermogravimetric differential thermal analysis (TGDTA) measurements revealed that most of the (MeCp)2Ni is vaporized without thermal decomposition and it decomposes from 200°C to 250°C. (MeCp)2Ni has a low viscosity and a high vapor pressure (1 Torr at 73°C), and its transportability is sufficiently good for it to be used as a chemical vapor deposition (CVD) precursor. Ni was deposited at 300°C by CVD using a (MeCp)2Ni/H2 gas system. Ni reacted with the Si substrate, and X-ray diffraction (XRD) analysis showed that a part of the silicides had formed on the Si substrate. Si3H8 injection prevents the Si substrate from being consumed by the silicide reaction, and a conformal NiSi film with a flat interface on the Si substrate was obtained.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
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Machida Hideaki
Tri Chemical Laboratories Inc.
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Ogura Atsushi
Silicon Systems Research Laboratories Nec Corp.
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Kada Takeshi
Tri Chemical Laboratories Inc.
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Ishikawa Masato
Tri Chemical Laboratories Inc.
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Ohshita Yoshio
Toyota Technological Inst. Nagoya Jpn
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Ogura Atsushi
Silicon Systems Research Labs, NEC Corporation, 1120 Shimokuzawa, Sagamihara-shi, Kanagawa 229-1198, Japan
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Ogura Atsushi
Silicon System Research Labs., NEC Corp., 1120 Shimokuzawa, Sagamihara 229-1198, Japan
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Ishikawa Masato
Tri Chemical Laboratories Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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Ishikawa Masato
TRI Chemical Lab. Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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Kada Takeshi
Tri Chemical Laboratories Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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Kada Takeshi
TRI Chemical Lab. Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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Machida Hideaki
Tri Chemical Laboratories Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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Machida Hideaki
TRI Chemical Lab. Inc., 8154-217 Uenohara, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0112, Japan
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