In Situ Gravimetric Monitoring of the GaAs Growth Process in Atomic Layer Epitaxy
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概要
- 論文の詳細を見る
A gravimetric method for in situ monitoring of atomic layer epitaxy (ALE) is proposed and applied to the growth of GaAs by halogen transport ALE. An ALE growth system with an electrobalance is developed as a monitoring system. In the conventional method of measurement the growth rate of ALE is obtained as an average value, but the system can directly monitor the growth rate and the surface coverage in each cycle in actual ALE growth conditions. It is shown that the growth of the monomolecular layer unit occurs in each cycle in halogen transport GaAs ALE, and the gravimetric method makes in situ and real-time monitoring of growth rate possible on a submonolayer scale.
- 社団法人応用物理学会の論文
- 1991-11-01
著者
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Ikeda H
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Hashimoto S
Texas Instruments Tsukuba R & D Center Ltd. Ibaraki Jpn
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IKEDA Hitoshi
Department of Pathology/Pathophysiology, Division of Pathophysiological Science, Hokkaido University
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SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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IKEDA Hitoshi
Product Planning, Strategic Product Planning Department, Takeda Chemical Industries, Ltd.
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Ikeda Hitoshi
Product Planning Strategic Product Planning Department Takeda Chemical Industries Ltd.
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YASUTAKE Hiroshi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Ikeda Hitoshi
Department Of Clinical Laboratory Medicine The University Of Tokyo
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Yasutake Hiroshi
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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IKEDA Hitoshi
Department of Animal Physiology, Faculty of Agriculture, Nagoya University
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