In Situ Observation of Halogen-Transport Atomic Layer Epitaxy of GaAs in Inert Carrier Gas System
スポンサーリンク
概要
- 論文の詳細を見る
Atomic layer epitaxy (ALE) using GaCl source in an inert carrier gas system is investigated by means of two in situ monitoring methods: gravimetric method and surface photo-absorption (SPA) method. It is shown that the growth of a monomolecular layer unit occurs in the inert carrier gas system as well as in the H_2 carrier gas system. In the SPA measurement, the reflected light intensity during GaCl supply and subsequent inert gas or H_2 purge is stronger in the inert carrier gas system than that in the H_2 carrier gas system. Based on these results, reaction mechanisms are proposed for the two systems.
- 社団法人応用物理学会の論文
- 1993-09-01
著者
-
Takahashi Naoyuki
Department of Cardiology, Nihon University Surugadai Hospital
-
KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
-
YAGI MINORU
Department of Pediatric Surgery, Kurume University School of Medicine
-
SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
-
Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
-
Takahashi Naoyuki
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
-
Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
-
Yagi Minoru
Departmanets Of Pediatric Surgery Graduate School Of Medical And Dental Sciences Niigata University
-
Yagi Minoru
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
-
Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
-
Takahashi N
Toyohashi Univ. Technol. Toyohashi Jpn
関連論文
- PJ-076 Plasma Epinephrine and Epinephrine/norepinephrine Ratio During Head-up Tilt Test Decrease with Aging in Patients with Neurally Mediated Syncope(Autonomic nervous system-3, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-075 Cardioinhibitory Component of Neurally Mediated Syncope is Decreased with Aging(Autonomic nervous system-3, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- OJ-187 The Usefulness of Combination Therapy with Bepridil and Class 1c Anti-arrhythmic Drug on Pharmacological Defibrillation of Persistent Atrial Fibrillation(Arrhythmia, therapy-08, The 71st Annual Scientific Meeting of the Japanese Circulation Society
- OJ-205 The Focal Ablation of Atrial Flutter after Linear Ablation of Cavotricupid Isthmus(Arrhythmia, therapy-4 (A) OJ35,Oral Presentation (Japanese),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-633 Alcohol produces imbalance of adrenal and neuronal sympathtic activity in patients with alcohol-induced NMS(Autonomic Nervous System 5 (H) : PJ106)(Poster Session (Japanese))
- OJ-453 The long-term effect of cilostazol in patients with sino-atrial nodal dysfunction(Arrhythmia, Pharmacological Therapy 5 (A) : OJ55)(Oral Presentation (Japanese))
- OJ-187 The Usefulness of Combination Therapy with Bepridil and Class 1c Anti-arrhythmic Drug on Pharmacological Defibrillation of Persistent Atrial Fibrillation(Arrhythmia, therapy-08, The 71st Annual Scientific Meeting of the Japanese Circulation Society
- PJ-003 The Characteristics of Ventricular Tachyarrhythmia Associated with a High Incidence of Isolated Left Ventricular Non-compaction(PJ001,Arrhythmia, Others (Clinical/Pathophysiology) 1 (A),Poster Session (Japanese),The 73rd Annual Scientific Meeting o
- PJ-597 The Long-term Effect of Cilostazol on Symptomatic Bradycardia and Preserved Cardiac Function in Patients with Sick Sinus Syndrome(Arrhythmia, therapy(16)(A),Poster Session(Japanese),The 72nd Annual Scientific Meeting of the Japanese Circulation Soc
- PJ-402 Long-term Outcome of Combined Therapy with Bepridil and a Class Ic Antiarrhythmic Drug after Pharmacological Cardioversion of Persistent Atrial Fibrillation(Arrhythmia, therapy(25)(A),Poster Session(Japanese),The 72nd Annual Scientific Meeting of t
- Alcohol Produces Imbalance of Adrenal and Neuronal Sympathetic Activity in Patients With Alcohol-Induced Neurocardiogenic Syncope
- PJ-597 The Long-term Effect of Cilostazol on Symptomatic Bradycardia and Preserved Cardiac Function in Patients with Sick Sinus Syndrome(Arrhythmia, therapy(16)(A),Poster Session(Japanese),The 72nd Annual Scientific Meeting of the Japanese Circulation Soc
- PJ-402 Long-term Outcome of Combined Therapy with Bepridil and a Class Ic Antiarrhythmic Drug after Pharmacological Cardioversion of Persistent Atrial Fibrillation(Arrhythmia, therapy(25)(A),Poster Session(Japanese),The 72nd Annual Scientific Meeting of t
- OJ-187 The Usefulness of Combination Therapy with Bepridil and Class 1c Anti-arrhythmic Drug on Pharmacological Defibrillation of Persistent Atrial Fibrillation(Arrhythmia, therapy-08, The 71st Annual Scientific Meeting of the Japanese Circulation Society
- Nonlinear Magneto-Optical Studies of Magnetic Nano Structures Fabricated by Damascene Technique Using Electron Beam Lithography
- Renoprotective Effect and Cost-Effectiveness of Using Benidipine, a Calcium Channel Blocker, to Lower the Dose of Angiotensin Receptor Blocker in Hypertensive Patients with Albumiuria
- PJ-225 Long-term Renoprotective Effect with Calcium Channel Blocker on Top of Either Maximum or Lower Dose Angiotensin Receptor Blocker in Hypertensives(Hypertension, clinical-9 (H) PJ38,Poster Session (Japanese),The 70th Anniversary Annual Scientific Mee
- The Role of the Low-Amplitude Potential in the Initial Signal-Averaged P Wave Electrogram in the Sick Sinus Syndrome
- Alcohol-induced neurally mediated syncope : characteristics in humoral responses during headup tilt
- Localization of Sinus Nodal Impulset : Sinus Node Electrograms Mapping Guided by Intracardiac Echocardiography
- Mesenchymal Hamartoma of the Liver Accompanied by a Daughter Nodule : Report of a Case
- Growth of ZnO on Sapphire (0001) by the Vapor Phase Epitaxy Using a Chloride Source
- Postoperative Fecoflowmetric Analysis in Patients with Anorectal Malformation
- Treatment of ruptured undifferentiated sarcoma of the liver in children : a report of two cases and review of the literature
- Effects of Trimebutine on Intestinal Motility after Massive Small Bowel Resection
- Effects of Intestinal Muscular Wrapping on Remnant Intestinal Motility after Massive Small Bowel Resection in Conscious Canines
- A case of Currarino triad with familial sacral bony deformities
- A Huge Immature Cervical Teratoma in a Newborn : Report of a Case
- Investigation of Hydrogen Chemisorption on GaAs(111)A Ga Surface by In Situ Monitoring and Ab Initio Calculation
- Theoretical Investigation of Arsenic Desorption from GaAs(001) Surfaces under an Atmosphere of Hydrogen
- -333-SERIAL CHANGES OF HUMAN ATRIAL NATRIURETIC PEPTIDE DURING PERCUTANEOUS TRANSVENOUS MITRAL COMMISSUROTOMY : Atrial Natriuretic Polypeptide : FREE COMMUNICATIONS(II) : PROCEEDINGS OF THE 53th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIET
- Self-Separation of a Thick AIN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire
- In Situ Gravimetric Monitoring of Decomposition Rate from GaN (0001) and (000^^1) Surfaces Using Freestanding GaN : Semiconductors
- Preparation of Large Freestanding GaN Substrates by Hydride Vapor Phase Epitaxy Using GaAs as a Starting Substrate : Semiconductors
- In Situ Gravimetric Monitoring of Decomposition Rate from GaN Epitaxial Surface
- Growth of Thick Hexagonal GaN Layer on GaAs (111)A Surfaces for Freestanding GaN by Metalorganic Hydrogen Chloride Vapor Phase Epitaxy
- Investigation of Substrate Orientation Dependence for the Growth of GaN on GaAs(111)A and(111)B Surfaces by Metalorganic Hydrogen Chloride Vapor-Phase Epitaxy
- Halogen-Transport Atomic-Layer Epitaxy of Cubic GaN Monitored by In Situ Gravimetric Method
- Evidence of Cell-Mediated Cardiac Myocyte Injury Involved in the Heart Failure of a Patient With Progressive Systemic Sclerosis
- Intrahepatic Cholangiocarcinoma Arising 34 Years After Excision of a Type IV-A Congenital Choledochal Cyst : Report of a Case
- -0329-ESTIMATION OF SINUS NODE FUNCTION BY TOTAL PHARMACHOLOGICAL AUTONOMIC BLOCKADE (TAB) AT DIFFERENT AGES
- Growth of a NdBaCuO Superconducting Thin Film on a MgO Substrate by Mist Microwave-Plasma Chemical Vapor Deposition Using a CeO_2 Buffer Layer
- Thermodynamic Study on Metalorganic Vapor-Phase Epitaxial Growth of Group III Nitrides
- Growth of GaN on GaAs(111)B by Metalorganic Hydrogen Chloride VPE Using Double Buffer Layer
- Familial Nesidioblastosis in Two Sisters
- Posterior Sagittal Anorectoplasty for a Recto-vaginal Fistula Occurring 30 Years after Swenson's Operation for Hirschsprung's Disease
- Thermodynamic Analysis of Hydride Vapor Phase Epitaxy of GaN
- Long-term Prognosis for Non-ischemic Heart Disease Patients with Premature Ventricular Contraction and Non-sustained Ventricular Tachycardia
- Study of Pulse Laser Assisted Metalorganic Vapor Phase Epitaxy of InGaN with Large Indium Mole Fraction
- Investigation of Arsenic Desorption from GaAs (111) B Surface in Atmospheric Pressure Atomic Layer Epitaxy
- Growth of InN at High Temperature by Halide Vapor Phase Epitaxy
- Vapor Phase Epitaxy of In_xGa_N Using InCl_3, GaCl_3 and NH_3 Sources
- Growth of NdBaCu0 Superconducting Thin Films Using Mist Microwave-Plasma Chemical Vapor Deposition with Dual Sources
- In Situ Monitoring of the Chemisorption of Hydrogen Atoms on (001) GaAs Surface in GaAs Atomic Layer Epitaxy
- Thermodynamic Analysis of In_xGa_N Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy
- Investigation of Buffer Iayer of Cubic GaN Epitaxial Films on (100)GaAs Grown by Metalorganic-Hydrogen Chloride Vapor-Phase Epitaxy
- New Epitaxial Growth Method of Cubic GaN on (100) GaAs Using (CH_3)_3Ga, HCl and NH_3
- Influence of Sr Content on Tl-Ba-Sr-Ca-Cu-O Superconducting Thin Films Prepared by the Mist Microwave-Plasma Chemical Vapor Deposition Method
- Preparation of Tl-Systerm Superconducting Thin Films by the Mist Microwave-Plasma Chermical Vapor Deposition Method
- Characterization of Maghemite Thin Films Prepared by Spin-Coating a Gel Solution
- Solid Composition of In_Ga_xAs Grown by the Halogen Transport Atomic Layer Epitaxy : Condensed Matter
- Thermodynamic Analysis on Molecular Beam Epitaxy of GaN, InN and AIN
- Thermodynamical Analysis of AlGaInP Vapor Growth
- Vapor-Phase Epitaxial Growth of GaAs by the Single Flat Temperature Zone Method
- Unstable Region of Solid Composition in Ternary Nitride Alloys Grown by Metalorganic Vapor-Phase Epitaxy
- Thermodynamic Calculation of the VPE Growth of In_Ga_xAs_yP_ by the Trichloride Method
- Growth and Thermodynamic Analysis of Atomic Layer Epitaxy of ZnS_xSe_
- In Situ Gravimetric Monitoring of the GaAs Growth Process in Atomic Layer Epitaxy
- In Situ Monitoring of Surface Kinetics in GaAs Atomic Layer Epitaxy by Surface Photo-Absorption Method
- Atmospheric Pressure Atomic Layer Epitaxy of ZnSe Using Zn and H_2 Se
- Growth of GaAs by Cold-Wall Metalorganic-Chloride Vapor Phase Epitaxy
- Effects of Carrier Gas and Substrate on the Electrical Properties of Epitaxial GaAs Grown by the Single Flat Temperature Zone Chloride VPE Method
- Halide Vapor Phase Epitaxy of Mg_xZn_O Layers on Zn-Polar ZnO Substrates
- Peripheral CD5+B Cells Reflect Regional Immunity of the Liver in Pediatric Cholestatic Diseases
- In Situ Observation of Halogen-Transport Atomic Layer Epitaxy of GaAs in Inert Carrier Gas System
- A disturbance of the gastric myoelectric activity in post-operative patients with biliary atresia
- Key Factors Influencing Bowel Function After Ileal W-Pouch Anal Anastomosis : A Spectral Analysis of W-Pouch Motor Activity
- In Situ Optical Monitoring of Hydrogen Chemisorption on the GaAs(111)B Ga Surface
- Expression of mouse osteocalcin transcripts, OG1 and OG2, is differently regulated in bone tissues and osteoblast cultures
- The Mechanism of Coupling between Bone Resorption and Formation
- Sacral parasite with histopathological features of an unequally conjoined twin
- The VPE Growth of GaAs by the Pulsed Introduction of H_2 : Condensed Matter
- Successful Treatment of Blunt Trauma Involving Complete Laceration of the Pancreas and Duodenum in a 7 - Year - Old Child: Report of a Case
- Oxidative stress profile in the post-operative patients with biliary atresia
- A case of split notochord syndrome with congenital ileal atresia, the total absence of a colon, and a dorsal enteric cyst communicating to the retroperitoneal isolated ceca with a vesical fistula
- Extracellular Ca^ uptake by T cells might help to make a diagnosis of acute rejection
- Preparation of (Tl, Pb)-Sr-Ca-Cu-O Superconducting Thin Films by the Mist Microwave-Plasma Chemical Vapor Deposition Method
- Thermodynamic Calculation of the VPE Growth of In_Ga_xAs by the Trichloride Method
- Determination of Surface Chemical Species in GaAs Atomic Layer Epitaxy by In Situ Gravimetric Monitoring
- Preparation of (Bi, Pb)-Sr-Ca-Cu-O Superconducting Thin Films by the Mist Microwave-Plasma Chemical Vapor Deposition Method
- Preparation of Y-Ba-Cu-O Superconducting Thin Films by the Mist Microwave Plasma Decomposition Method
- Thermodynamic Analysis on Vapor Phase Epitaxy of GaAs by GaCl_3 and AsH_3 System : Condensed Matter
- Theoretical Investigation of Arsenic Desorption from GaAs(001) Surfaces under an Atmosphere of Hydrogen
- Improvements in Optical Properties of (0001) ZnO Layers Grown on (0001) Sapphire Substrates by Halide Vapor Phase Epitaxy Using Thick Buffer Layers
- Preparation of a Freestanding AIN Substrate from a Thick AIN Layer Grown by Hydride Vapor Phase Epitaxy on a Bulk AIN Substrate Prepared by Physical Vapor Transport
- Solid Composition Control of MgxZn1-xO in Halide Vapor Phase Epitaxy
- Study of Pulse Laser Assisted Metalorganic Vapor Phase Epitaxy of InGaN with Large Indium Mole Fraction
- Thermodynamic Analysis of Coherently Grown GaAsN/Ge: Effects of Different Gaseous Sources
- Two-Step Growth of (0001) ZnO Single-Crystal Layers on (0001) Sapphire Substrates by Halide Vapor Phase Epitaxy
- Influence of Lattice Constraint from InN and GaN Substrate on Relationship between Solid Composition of InxGa1-xN Film and Input Mole Ratio during Molecular Beam Epitaxy