Halide Vapor Phase Epitaxy of Mg_xZn_<1-x>O Layers on Zn-Polar ZnO Substrates
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-12-25
著者
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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KUMAGAI Yoshinao
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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HOSAKA Shigetoshi
Technology Development Center, Tokyo Electron Ltd.
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Koukitu Akinori
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Takasu Hidemi
Research And Development Headquarters Rohm Co. Ltd.
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YOSHII Naoki
Technology Development Center, Tokyo Electron Ltd.
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FUJII Tetsuo
Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and
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MASUDA Rui
Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and
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Masuda Rui
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Kumagai Yoshinao
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Fujii Tetsuo
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Yoshii Naoki
Technology Development Center Tokyo Electron Ltd.
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Hosaka Shigetoshi
Technology Development Center Tokyo Electron Ltd.
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