Atmospheric Pressure Atomic Layer Epitaxy of ZnSe Using Zn and H_2 Se
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概要
- 論文の詳細を見る
Atmospheric pressure ALE (atomic layer epitaxy) has been achieved to grow ZnSe for the first time using Zn and H_2Se. It is confirmed that the growth rate is controlled by the self-limiting process itself. The ALE growth of ZnSe is observed in the substrate temperature range of 350-500℃ and in the input partial pressure ranges of 5×10^<-6>-1×10^<-4> atm for Zn and 4×10^<-5>-2×10^<-3> atm for H_2Se. Lattice parameters perpendicular to the surface plane and the values of FWHM for the diffraction pattern were obtained by the X-ray double-crystal diffraction measurement.
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Ikeda H
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Hashimoto S
Texas Instruments Tsukuba R & D Center Ltd. Ibaraki Jpn
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IKEDA Hitoshi
Department of Pathology/Pathophysiology, Division of Pathophysiological Science, Hokkaido University
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SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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IKEDA Hitoshi
Product Planning, Strategic Product Planning Department, Takeda Chemical Industries, Ltd.
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SAEGUSA Akihiko
Department of Industrial Chemistry, Tokyo University of Agriculture and Technology
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Saegusa Akihiko
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Ikeda Hitoshi
Product Planning Strategic Product Planning Department Takeda Chemical Industries Ltd.
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KITHO Masanori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Ikeda Hitoshi
Department Of Clinical Laboratory Medicine The University Of Tokyo
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Kitho Masanori
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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IKEDA Hitoshi
Department of Animal Physiology, Faculty of Agriculture, Nagoya University
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