Investigation of Arsenic Desorption from GaAs (111) B Surface in Atmospheric Pressure Atomic Layer Epitaxy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-11-15
著者
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Taki Tetsuya
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Taki Tetsuya
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Taki Tetsuya
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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NARITA Koji
Department of Applied Chemistry, Faculty of Technology, Tokyo University of Agriculture and Technolo
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Narita K
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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