Vapor Phase Epitaxy of In_xGa_<1-x>N Using InCl_3, GaCl_3 and NH_3 Sources
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-05-15
著者
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Takahashi Naoyuki
Department of Cardiology, Nihon University Surugadai Hospital
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KOUKITU Akinori
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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SEKI Hisashi
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Takahashi Naoyuki
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Seki H
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Seki Hisashi
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Takahashi N
Toyohashi Univ. Technol. Toyohashi Jpn
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MATSUMOTO Ryu
Department of Applied Chemistry, Tokyo University of Agriculture and Technology
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Matsumoto Ryu
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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