Solid Composition Control of MgxZn1-xO in Halide Vapor Phase Epitaxy
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概要
- 論文の詳細を見る
Using thermodynamic analysis, the solid compositions of Mg in MgxZn1-xO grown by halide vapor phase epitaxy (HVPE) are calculated in terms of the various input partial pressures of the gaseous species. It is revealed that the Mg composition shows temperature stability up to 1200 °C, while there is a strong dependence on the input VI/II ratio and the input H2 partial pressure at high temperatures. Based on the thermodynamic calculations, the epitaxial growth of MgxZn1-xO layers with different Mg compositions has been demonstrated. The thermodynamic model is found to accurately describe the experimentally observed dependence of Mg compositions on the input VI/II ratio that is used in the growth of MgxZn1-xO.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2010-12-25
著者
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Koukitu Akinori
Department Of Applied Chemistry Faculty Of Technology Tokyo University Of Agriculture And Technology
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Kumagai Yoshinao
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Yoshii Naoki
Technology Development Center Tokyo Electron Ltd.
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Koukitu Akinori
Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
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Yoshii Naoki
Technology Development Center, Tokyo Electron Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan
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Fujii Tetsuo
Research and Development Headquarters, ROHM Co., Ltd., 21 Saiin Mizosaki-cho, Ukyo-ku, Kyoto 615-8585, Japan
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Kumagai Yoshinao
Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
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