Effects of Excited Species in Electron Cyclotron Resonance Plasma on SiN Film Resistivity
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-15
著者
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Suzuki Kenji
Institute For Materials Research Laboratory Tohoku University
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SAITO Katsuaki
Hitachi Research Laboratory, Hitachi Ltd.
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OHUE Michio
Hitachi Research Laboratory, Hitachi Ltd.
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Chiba Natsuyo
Research Laboratory For Advanced Technology Seiko Instruments Inc.
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Ohue Michio
Hitachi Research Laboratory Hitachi Ltd.
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Fukuda Takuya
Hitachi Research Laboratory Hitachi Ltd.
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SUZUKI Kazuo
Hitachi Works, Hitachi, Ltd.
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CHIBA Natsuyo
Production Engineering Research Laboratory, Hitachi, Ltd.
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Suzuki K
横浜国大 大学院工学研究院
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鈴木 和夫
横浜大
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